Patents by Inventor Hans Mathèe

Hans Mathèe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of processing of an object
    Patent number: 8816303
    Abstract: A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: August 26, 2014
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Josef Biberger, Ralph Pulwey, Jaroslaw Paluszynski, Dietmar Doenitz, Hans Mathèe, Michael Steigerwald
  • Method of Processing of an Object
    Publication number: 20120145895
    Abstract: A method of processing of an object comprises scanning a particle beam across a surface of the object and detecting electrons emerging from the object due to the scanning; determining a height difference between the surface of the object and a predetermined surface for each of plural of locations on the surface of the object based on the detected electrons; determining a processing intensity for each of the plural locations on the surface of the object based on the determined height differences; and directing a particle beam to the plural locations based on the determined processing intensities, in order to remove material from or deposit material on the object at the plural locations.
    Type: Application
    Filed: June 20, 2011
    Publication date: June 14, 2012
    Applicant: CARL ZEISS NTS GMBH
    Inventors: Josef BIBERGER, Ralph Pulwey, Jaroslaw Paluszynski, Dietmar Doenitz, Hans Mathèe, Michael Steigerwald