Patents by Inventor Hans-Peter Schonherr

Hans-Peter Schonherr has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MBE DEVICE AND METHOD FOR THE OPERATION THEREOF
    Publication number: 20090137099
    Abstract: A molecular beam epitaxy (MBE) device (100) which is designed for the reactive deposition of a group III nitride compound semiconductor comprises a vacuum chamber (10) which comprises at least one molecular beam source (11) and at least one injector (12) designed to inject ammonia into the vacuum chamber (10), a first cold trap device (20) comprising at least one cold trap (21, 22) designed to condense excess ammonia, a pump device (30) comprising at least one pump (31, 33, 35) designed to evacuate the vacuum chamber (10), and a barrier device (40), by means of which the first cold trap device (20) can be separated from the vacuum chamber (10). A method for operating an MBE device is also described.
    Type: Application
    Filed: November 13, 2008
    Publication date: May 28, 2009
    Applicants: FORSCHUNGSVERBUND BERLIN E.V., CREATEC FISCHER & CO. GMBH
    Inventors: Hans-Peter Schonherr, Albrecht Fischer