Abstract: A PECVD boat has at least one boat plate for accommodating wafers, for transport into and out of vacuum coating chambers. The boat plate is oriented vertically and has a plurality of U-shaped accommodating slots for accommodating wafers, which slots are oriented in the longitudinal direction of the boat plate and are open at the top, in such a way that the wafers inserted into the accommodating slots are aligned with the plate line of the boat plate.

Abstract: A radiant heating arrangement with a high infrared heating capacity for treatment chambers provides a vacuum-compatible radiant heating system with which it is possible to achieve considerable radiation levels reliably. The radiant heating arrangement includes a tube that is permeable to infrared radiation. The tube extends into the treatment chamber and penetrates the wall of the chamber with at least one end. A source of infrared radiation is situated inside the tube with the inside of the tube being isolated from the atmosphere inside the treatment chamber.