Patents by Inventor Hanyu Fan

Hanyu Fan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • POLISHING COMPOSITIONS AND METHODS OF USE THEREOF
    Publication number: 20240327675
    Abstract: This disclosure relates to a polishing composition that includes an abrasive; at least one Si-containing compound including an acidic group, an ester thereof, or a salt thereof; and water. This disclosure also features a method of using the polishing composition to polish a substrate.
    Type: Application
    Filed: March 26, 2024
    Publication date: October 3, 2024
    Inventors: Hanyu Fan, Bin Hu, Yannan Liang, Ting-Kai Huang, Eric Turner
  • POLISHING COMPOSITIONS AND METHODS OF USE THEREOF
    Publication number: 20240174892
    Abstract: This disclosure relates to a polishing composition that includes an abrasive, at least two pH adjusters, a barrier film removal rate enhancer, a low-k removal rate inhibitor, and an azole-containing corrosion inhibitor. This disclosure also features a method of using the polishing composition to polish a substrate containing copper and silicon oxide.
    Type: Application
    Filed: November 21, 2023
    Publication date: May 30, 2024
    Inventors: Ting-Kai Huang, Yannan Liang, Bin Hu, Chun-Fu Chen, Ying-Shen Chuang, Tzu-Wei Chiu, Sung TsaiLin, Hanyu Fan, Hsin-Hsien Lu