Abstract: In a method of forming a pattern, a first pattern is formed over an underlying layer, the first pattern including main patterns and a lateral protrusion having a thickness of less than 25% of a thickness of the main patterns, a hard mask layer is formed over the first pattern, a planarization operation is performed to expose the first pattern without exposing the lateral protrusion, a hard mask pattern is formed by removing the first pattern while the lateral protrusion being covered by the hard mask layer, and the underlying layer is patterned using the hard mask pattern as an etching mask.

Abstract: A temperature control system includes a temperature switch, an air outlet valve, an air inlet valve, and a control device. The temperature switch is utilized to detect and determine the external temperature and internal temperature of a container. The control device receives a first and a second signal and determines whether the air outlet valve and the air inlet valve are opened or closed. When the control device receives the first signal, the control device opens the air outlet valve and the air inlet valve, when the control device receives the second signal, the control device closes the air outlet valve and the air inlet valve.