Abstract: Various embodiments herein relate to methods, apparatus, and systems for etching high aspect ratio features in dielectric material. The dielectric material is etched using a multi-layer or graded hardmask having at least two different compositions. Different etching regimes are used when the different portions of the hardmask are exposed. For example, a feature may be etched to a first depth at a first temperature while an upper portion of the hardmask is exposed, and then etched to a final depth at a second temperature while a lower portion of the hardmask is exposed, the second temperature being higher than the first temperature.

Abstract: Examples are disclosed that relate to etching features in a layer of silicon oxide doped with an etch rate-modifying dopant. One example provides a method of performing a memory device fabrication process. The method comprises placing a substrate in a processing chamber of a processing tool, the substrate comprising a first structure comprising alternating layers in a mold stack for a 3D memory structure, and the substrate also comprising a second structure comprising a silicon oxide layer doped with an etch rate-modifying dopant. The method further comprises controlling the processing tool to perform an etching cycle comprising etching at least a portion of a channel hole in the first structure of the substrate and at least a portion of a hole in the second structure of the substrate.

Abstract: Provided is a segmented bending section assembly for a disposable ureteroscope, including a bending sectional tube, elastic tubes, and traction cables. Multiple U-shaped limiting grooves arranged in an axial direction of the bending sectional tube are formed in a side wall of a tail portion of the bending sectional tube. An end portion of each of the elastic tubes abuts against a bottom wall of each U-shaped limiting groove, a side wall of the elastic tube abuts against an inside wall of the U-shaped limiting groove, and the elastic tube is welded to the U-shaped limiting groove. A tube body of the bending sectional tube is internally provided with multiple wire-passing channels for the traction cables to pass through, and the traction cable penetrates through the elastic tube and the wire-passing channel and then are fixedly connected to a front end of the bending sectional tube.

Abstract: Methods for forming patterned multi-layer stacks including a metal-containing layer are provided herein. Methods involve using silicon-containing non-metal materials in a multi-layer stack including one sacrificial layer to be later removed and replaced with metal while maintaining etch contrast to pattern the multi-layer stack and selectively remove the sacrificial layer prior to depositing metal. Methods involve using silicon oxycarbide in lieu of silicon nitride, and a sacrificial non-metal material in lieu of a metal-containing layer, to fabricate the multi-layer stack, pattern the multi-layer stack, selectively remove the sacrificial non-metal material to leave spaces in the stack, and deposit metal-containing material into the spaces. Sacrificial non-metal materials include silicon nitride and doped polysilicon, such as boron-doped silicon.

Abstract: Methods for forming patterned multi-layer stacks including a metal-containing layer are provided herein. Methods involve using silicon-containing non-metal materials in a multi-layer stack including one sacrificial layer to be later removed and replaced with metal while maintaining etch contrast to pattern the multi-layer stack and selectively remove the sacrificial layer prior to depositing metal. Methods involve using silicon oxycarbide in lieu of silicon nitride, and a sacrificial non-metal material in lieu of a metal-containing layer, to fabricate the multi-layer stack, pattern the multi-layer stack, selectively remove the sacrificial non-metal material to leave spaces in the stack, and deposit metal-containing material into the spaces. Sacrificial non-metal materials include silicon nitride and doped polysilicon, such as boron-doped silicon.

Abstract: Provided is a use of a regulator of ITPRIPL1 in the preparation of a drug that regulates immune responses or resists tumors, the regulator being used to increase or decrease the expression or function of the ITPRIPL1 gene or protein in an organism. Also provided is a pharmaceutical composition, which comprises the regulator used in the use. Also provided are an isolated ITPRIPL1 recombinant protein and an antibody that recognizes and binds to the ITPRIPL1. On the basis of the principle that an ITPRIPL1 protein binds to CD3? and NRP2 receptors to regulate the functions of different immune cells, and then participates in the regulation of immune responses and a process of immune evasion of a tumor, it is confirmed that a regulator of ITPRIPL1 may be used to prepare a drug or a pharmaceutical composition, and may be applied to suppress tumors, autoimmune disease, transplant rejection, allergies and infections and other diseases.

Abstract: Methods for forming patterned multi-layer stacks including a metal-containing layer are provided herein. Methods involve using silicon-containing non-metal materials in a multi-layer stack including one sacrificial layer to be later removed and replaced with metal while maintaining etch contrast to pattern the multi-layer stack and selectively remove the sacrificial layer prior to depositing metal. Methods involve using silicon oxycarbide in lieu of silicon nitride, and a sacrificial non-metal material in lieu of a metal-containing layer, to fabricate the multi-layer stack, pattern the multi-layer stack, selectively remove the sacrificial non-metal material to leave spaces in the stack, and deposit metal-containing material into the spaces. Sacrificial non-metal materials include silicon nitride and doped polysilicon, such as boron-doped silicon.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: An optical sensing device applicable to two dimensional electric field, includes sequentially connected input polarization maintaining fibers, a sensing unit, an output single mode fiber, a photodetector and a signal processing unit, the sensing unit includes a lithium niobate substrate; a first Y optical waveguide and two Mach Zehnder structure optical waveguides are arranged on the lithium niobate substrate; the input of the first Y optical waveguide is connected with the output of the laser source, the output is respectively connected to the inputs of the two Mach Zehnder structure optical waveguides; the outputs of the two Mach Zehnder structure optical waveguides are connected to the photodetector; dipole antenna is arranged at any single waveguide arm of each Mach Zehnder structure optical waveguide, the polarization directions of the two dipole antennas are in orthogonality with each other.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: A virtual reality (VR) system supports improved interactive control processes/services. These interactive control processes/services include detecting movement of a controller associated with a virtual reality (VR) environment, determining an angle of rotation based on the movement, determining a magnitude of force associated with the movement, determining a path in the VR environment that corresponds to the angle of rotation and the magnitude of force, and projecting the path in the VR environment.

Abstract: An optical sensing device applicable to two dimensional electric field, includes sequentially connected input polarization maintaining fibers, a sensing unit, an output single mode fiber, a photodetector and a signal processing unit, the sensing unit includes a lithium niobate substrate; a first Y optical waveguide and two Mach Zehnder structure optical waveguides are arranged on the lithium niobate substrate; the input of the first Y optical waveguide is connected with the output of the laser source, the output is respectively connected to the inputs of the two Mach Zehnder structure optical waveguides; the outputs of the two Mach Zehnder structure optical waveguides are connected to the photodetector; dipole antenna is arranged at any single waveguide arm of each Mach Zehnder structure optical waveguide, the polarization directions of the two dipole antennas are in orthogonality with each other.

Abstract: A traveling-wave loop antenna based on a metal ring cavity for generating a radio frequency OAM beam includes a main structure which is the metal ring cavity whose top surface has an annular slot circumferentially opened. Two openings, ¼ of a perimeter of the metal ring cavity apart, are two excitation source ports of the antenna, for connecting a metal waveguide. When the two ports are inputted with microwave sources having the same frequency and a phase difference of ±90°, an electromagnetic field in the metal ring cavity exhibits a traveling-wave distribution propagating circumferentially clockwise or counterclockwise. The annular slot constitutes the antenna. A reasonable design of a size of the metal ring cavity and a position of the annular slot realizes a conversion from a microwave guided-wave mode to an OAM mode and a generation of the radio frequency OAM beams with different orders l in free space.

Abstract: A traveling-wave loop antenna based on a metal ring cavity for generating a radio frequency OAM beam includes a main structure which is the metal ring cavity whose top surface has an annular slot circumferentially opened. Two openings ¼ of a perimeter of the metal ring cavity apart, are two excitation source ports of the antenna, for connecting a metal waveguide. When the two ports are inputted with microwave sources having the same frequency and a phase difference of ±90°, an electromagnetic field in the metal ring cavity exhibits a traveling-wave distribution propagating circumferentially clockwise or counterclockwise. The annular slot constitutes the antenna. A reasonable design of a size of the metal ring cavity and a position of the annular slot realizes a conversion from a microwave guided-wave mode to an OAM mode and a generation of the radio frequency OAM beams with different orders l in free space.