Patents by Inventor Hao-En Luo

Hao-En Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE
    Publication number: 20230333465
    Abstract: In pellicle cleaning, a gas is flowed on a pellicle using at least one gas nozzle. During the flowing, the pellicle is moved respective to the at least one gas nozzle. During the flowing, the pellicle is exposed to ionized gas generated by at least one alpha ionizer. Also during the flowing, an ultrasonic wave is applied to the pellicle using an ultrasound transducer or transducer array. The gas nozzle may have a nozzle aperture comprising a slit or a linear array of apertures arranged parallel with a pellicle membrane of the pellicle.
    Type: Application
    Filed: April 15, 2022
    Publication date: October 19, 2023
    Inventors: Kun-Lung Hsieh, Tzu Han Liu, Hao-En Luo, Chih-Wei Wen