Patents by Inventor Hao-Hsiung Lin

Hao-Hsiung Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10515998
    Abstract: A metal-insulator-semiconductor-insulator-metal (MISIM) device includes a semiconductor layer, an insulating layer disposed over an upper surface of the semiconductor layer, a back electrode disposed over a lower surface of the semiconductor layer opposing the upper surface, and first and second electrodes disposed over the insulating layer and spaced-apart from each other.
    Type: Grant
    Filed: June 13, 2018
    Date of Patent: December 24, 2019
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Jenn-Gwo Hwu, Hao-Hsiung Lin, Chang-Feng Yan, Samuel C. Pan
  • Patent number: 10510611
    Abstract: A semiconductor device includes a semiconductor fin protruding from a substrate, a gate electrode over the semiconductor fin, a gate insulating layer between the semiconductor fin and the gate electrode, source and drain regions disposed on opposite sides of the semiconductor fin, a first stressor formed in a region between the source and drain regions. The first stressor is a grading strained stressor including multiple graded portions formed at graded depths. The first stressor is configured to create one of a graded compressive stress or a graded tensile stress.
    Type: Grant
    Filed: July 3, 2019
    Date of Patent: December 17, 2019
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Che-Wei Yang, Hao-Hsiung Lin, Samuel C. Pan
  • Patent number: 10504999
    Abstract: The current disclosure describes semiconductor devices, e.g., transistors including a thin semimetal layer as a channel region over a substrate, which includes bandgap opening and exhibits semiconductor properties. Described semiconductor devices include source/drain regions that include a thicker semimetal layer over the thin semimetal layer serving as the channel region, this thicker semimetal layer exhibiting metal properties. The semimetal used for the source/drain regions include a same or similar semimetal material as the semimetal of the channel region.
    Type: Grant
    Filed: March 15, 2018
    Date of Patent: December 10, 2019
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Che-Wei Yang, Hao-Hsiung Lin
  • Publication number: 20190326178
    Abstract: A semiconductor device includes a semiconductor fin protruding from a substrate, a gate electrode over the semiconductor fin, a gate insulating layer between the semiconductor fin and the gate electrode, source and drain regions disposed on opposite sides of the semiconductor fin, a first stressor formed in a region between the source and drain regions. The first stressor is a grading strained stressor including multiple graded portions formed at graded depths. The first stressor is configured to create one of a graded compressive stress or a graded tensile stress.
    Type: Application
    Filed: July 3, 2019
    Publication date: October 24, 2019
    Inventors: Che-Wei YANG, Hao-Hsiung LIN, Samuel C. PAN
  • Publication number: 20190288075
    Abstract: The current disclosure describes semiconductor devices, e.g., transistors including a thin semimetal layer as a channel region over a substrate, which includes bandgap opening and exhibits semiconductor properties. Described semiconductor devices include source/drain regions that include a thicker semimetal layer over the thin semimetal layer serving as the channel region, this thicker semimetal layer exhibiting metal properties. The semimetal used for the source/drain regions include a same or similar semimetal material as the semimetal of the channel region.
    Type: Application
    Filed: March 15, 2018
    Publication date: September 19, 2019
    Inventors: Che-Wei Yang, Hao-Hsiung Lin
  • Publication number: 20190245061
    Abstract: Methods of semiconductor arrangement formation are provided. A method of forming the semiconductor arrangement includes forming a first nucleus on a substrate in a trench or between dielectric pillars on the substrate. Forming the first nucleus includes applying a first source material beam at a first angle relative to a top surface of the substrate and concurrently applying a second source material beam at a second angle relative to the top surface of the substrate. A first semiconductor column is formed from the first nucleus by rotating the substrate while applying the first source material beam and the second source material beam. Forming the first semiconductor column in the trench or between the dielectric pillars using the first source material beam and the second source material beam restricts the formation of the first semiconductor column to a single direction.
    Type: Application
    Filed: April 15, 2019
    Publication date: August 8, 2019
    Inventors: Wei-Chieh CHEN, Hao-Hsiung LIN, Shu-Han CHEN, You-Ru LIN, Cheng-Hsien WU, Chih-Hsin KO, Clement Hsingjen WANN
  • Patent number: 10347538
    Abstract: A semiconductor device includes a semiconductor fin protruding from a substrate, a gate electrode over the semiconductor fin, a gate insulating layer between the semiconductor fin and the gate electrode, source and drain regions disposed on opposite sides of the semiconductor fin, a first stressor formed in a region between the source and drain regions. The first stressor is a grading strained stressor including multiple graded portions formed at graded depths. The first stressor is configured to create one of a graded compressive stress or a graded tensile stress.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: July 9, 2019
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., NATIONAL TAIWAN UNIVERSITY
    Inventors: Che-Wei Yang, Hao-Hsiung Lin, Samuel C. Pan
  • Patent number: 10263097
    Abstract: Methods of semiconductor arrangement formation are provided. A method of forming the semiconductor arrangement includes forming a first nucleus on a substrate in a trench or between dielectric pillars on the substrate. Forming the first nucleus includes applying a first source material beam at a first angle relative to a top surface of the substrate and concurrently applying a second source material beam at a second angle relative to the top surface of the substrate. A first semiconductor column is formed from the first nucleus by rotating the substrate while applying the first source material beam and the second source material beam. Forming the first semiconductor column in the trench or between the dielectric pillars using the first source material beam and the second source material beam restricts the formation of the first semiconductor column to a single direction.
    Type: Grant
    Filed: September 20, 2017
    Date of Patent: April 16, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Wei-Chieh Chen, Hao-Hsiung Lin, Shu-Han Chen, You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Publication number: 20190103441
    Abstract: A metal-insulator-semiconductor-insulator-metal (MISIM) device includes a semiconductor layer, an insulating layer disposed over an upper surface of the semiconductor layer, a back electrode disposed over a lower surface of the semiconductor layer opposing the upper surface, and first and second electrodes disposed over the insulating layer and spaced-apart from each other.
    Type: Application
    Filed: June 13, 2018
    Publication date: April 4, 2019
    Inventors: Jenn-Gwo HWU, Hao-Hsiung LIN, Chang-Feng YANG, Samuel C. PAN
  • Publication number: 20190088757
    Abstract: A method and structure for providing a GAA device. In some embodiments, a substrate including an insulating layer disposed thereon is provided. By way of example, a first metal portion is formed within the insulating layer. In various embodiments, a first lateral surface of the first metal portion is exposed. After exposure of the first lateral surface of the first metal portion, a first graphene layer is formed on the exposed first lateral surface. In some embodiments, the first graphene layer defines a first vertical plane parallel to the exposed first lateral surface. Thereafter, in some embodiments, a first nanobar is formed on the first graphene layer, where the first nanobar extends in a first direction normal to the first vertical plane defined by the first graphene layer.
    Type: Application
    Filed: November 19, 2018
    Publication date: March 21, 2019
    Inventors: Che-Wei Yang, Chi-Wen Liu, Hao-Hsiung Lin, Ling-Yen Yeh
  • Publication number: 20190035676
    Abstract: A method for manufacturing a semiconductor device includes forming a source region, a drain region, and a gate dielectric layer and a gate electrode covering a channel region between the source region and the drain region, forming an insulating layer over the source region, the drain region, and the gate electrode, forming first to third vias penetrating the insulating layer and exposing portions of the source region, the drain region, and the gate electrode, respectively, forming a source contact in the first via to electrically connect to the source region, forming a drain contact in the second via to electrically connect to the drain region, and forming a gate contact in the third via to electrically connect to the gate electrode. One or more of the first to third vias is formed by ion bombarding by a focused ion beam and followed by a thermal annealing process.
    Type: Application
    Filed: April 27, 2018
    Publication date: January 31, 2019
    Inventors: Che-Wei YANG, Hao-Hsiung LIN
  • Publication number: 20190006241
    Abstract: A semiconductor device includes a semiconductor fin protruding from a substrate, a gate electrode over the semiconductor fin, a gate insulating layer between the semiconductor fin and the gate electrode, source and drain regions disposed on opposite sides of the semiconductor fin, a first stressor formed in a region between the source and drain regions. The first stressor is a grading strained stressor including multiple graded portions formed at graded depths. The first stressor is configured to create one of a graded compressive stress or a graded tensile stress.
    Type: Application
    Filed: October 4, 2017
    Publication date: January 3, 2019
    Inventors: Che-Wei YANG, Hao-Hsiung LIN, Samuel C. PAN
  • Patent number: 10134865
    Abstract: A method and structure for providing a GAA device. In some embodiments, a substrate including an insulating layer disposed thereon is provided. By way of example, a first metal portion is formed within the insulating layer. In various embodiments, a first lateral surface of the first metal portion is exposed. After exposure of the first lateral surface of the first metal portion, a first graphene layer is formed on the exposed first lateral surface. In some embodiments, the first graphene layer defines a first vertical plane parallel to the exposed first lateral surface. Thereafter, in some embodiments, a first nanobar is formed on the first graphene layer, where the first nanobar extends in a first direction normal to the first vertical plane defined by the first graphene layer.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: November 20, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Che-Wei Yang, Chi-Wen Liu, Hao-Hsiung Lin, Ling-Yen Yeh
  • Publication number: 20180033889
    Abstract: A semiconductor device includes a semiconductor fin protruding from a substrate, a gate electrode over the semiconductor fin, a gate insulating layer between the semiconductor fin and the gate electrode, source and drain regions disposed on opposite sides of the semiconductor fin, a first stressor formed in a region between the source and drain regions. The first stressor including one material selected from the group consisting of He, Ne, and Ga.
    Type: Application
    Filed: March 9, 2017
    Publication date: February 1, 2018
    Inventors: Che-Wei YANG, Hao-Hsiung LIN, Samuel C. PAN
  • Publication number: 20180026116
    Abstract: Methods of semiconductor arrangement formation are provided. A method of forming the semiconductor arrangement includes forming a first nucleus on a substrate in a trench or between dielectric pillars on the substrate. Forming the first nucleus includes applying a first source material beam at a first angle relative to a top surface of the substrate and concurrently applying a second source material beam at a second angle relative to the top surface of the substrate. A first semiconductor column is formed from the first nucleus by rotating the substrate while applying the first source material beam and the second source material beam. Forming the first semiconductor column in the trench or between the dielectric pillars using the first source material beam and the second source material beam restricts the formation of the first semiconductor column to a single direction.
    Type: Application
    Filed: September 20, 2017
    Publication date: January 25, 2018
    Inventors: Wei-Chieh CHEN, Hao-Hsiung Lin, Shu-Han Chen, You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Publication number: 20170317181
    Abstract: A method and structure for providing a GAA device. In some embodiments, a substrate including an insulating layer disposed thereon is provided. By way of example, a first metal portion is formed within the insulating layer. In various embodiments, a first lateral surface of the first metal portion is exposed. After exposure of the first lateral surface of the first metal portion, a first graphene layer is formed on the exposed first lateral surface. In some embodiments, the first graphene layer defines a first vertical plane parallel to the exposed first lateral surface. Thereafter, in some embodiments, a first nanobar is formed on the first graphene layer, where the first nanobar extends in a first direction normal to the first vertical plane defined by the first graphene layer.
    Type: Application
    Filed: July 17, 2017
    Publication date: November 2, 2017
    Inventors: Che-Wei YANG, Chi-Wen LIU, Hao-Hsiung LIN, Ling-Yen YEH
  • Patent number: 9773889
    Abstract: Methods of semiconductor arrangement formation are provided. A method of forming the semiconductor arrangement includes forming a first nucleus on a substrate in a trench or between dielectric pillars on the substrate. Forming the first nucleus includes applying a first source material beam at a first angle relative to a top surface of the substrate and concurrently applying a second source material beam at a second angle relative to the top surface of the substrate. A first semiconductor column is formed from the first nucleus by rotating the substrate while applying the first source material beam and the second source material beam. Forming the first semiconductor column in the trench or between the dielectric pillars using the first source material beam and the second source material beam restricts the formation of the first semiconductor column to a single direction.
    Type: Grant
    Filed: July 18, 2014
    Date of Patent: September 26, 2017
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Wei-Chieh Chen, Hao-Hsiung Lin, Shu-Han Chen, You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 9711607
    Abstract: A method and structure for providing a GAA device. In some embodiments, a substrate including an insulating layer disposed thereon is provided. By way of example, a first metal portion is formed within the insulating layer. In various embodiments, a first lateral surface of the first metal portion is exposed. After exposure of the first lateral surface of the first metal portion, a first graphene layer is formed on the exposed first lateral surface. In some embodiments, the first graphene layer defines a first vertical plane parallel to the exposed first lateral surface. Thereafter, in some embodiments, a first nanobar is formed on the first graphene layer, where the first nanobar extends in a first direction normal to the first vertical plane defined by the first graphene layer.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: July 18, 2017
    Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., National Taiwan University
    Inventors: Che-Wei Yang, Chi-Wen Liu, Hao-Hsiung Lin, Ling-Yen Yeh
  • Publication number: 20160020302
    Abstract: Methods of semiconductor arrangement formation are provided. A method of forming the semiconductor arrangement includes forming a first nucleus on a substrate in a trench or between dielectric pillars on the substrate. Forming the first nucleus includes applying a first source material beam at a first angle relative to a top surface of the substrate and concurrently applying a second source material beam at a second angle relative to the top surface of the substrate. A first semiconductor column is formed from the first nucleus by rotating the substrate while applying the first source material beam and the second source material beam. Forming the first semiconductor column in the trench or between the dielectric pillars using the first source material beam and the second source material beam restricts the formation of the first semiconductor column to a single direction.
    Type: Application
    Filed: July 18, 2014
    Publication date: January 21, 2016
    Inventors: Wei-Chieh Chen, Hao-Hsiung Lin, Shu-Han Chen, You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 7538406
    Abstract: An ambient light sensor includes a substrate, a buffer layer formed on the substrate, an absorption layer formed on the buffer layer for absorbing the visible light, and a filter layer formed on the absorption layer for filtering infrared light and high-energy photon insensitive to human eye. The absorption layer is a PIN junction having a compositional graded intrinsic layer. The peak wavelength of responsivity spectrum of the ambient light sensor is very close to that of human eye.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: May 26, 2009
    Assignee: National Taiwan University
    Inventors: Hao-Hsiung Lin, Ta-Chun Ma, Yu-Ru Lin, Jyun-Ping Wang, Cheng-Hong Huang