Patents by Inventor Haobo NI

Haobo NI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR WAFER WET PROCESS
    Publication number: 20250062141
    Abstract: A method includes placing a wafer in a process bath filled with a process solution; determining whether the wafer is in the process bath after a pre-set process time after placing the wafer in the process bath; and in response the determination determines that the wafer is in the process bath after the pre-set process time, draining the process solution from the process bath while the wafer is in the process bath.
    Type: Application
    Filed: August 31, 2023
    Publication date: February 20, 2025
    Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC CHINA COMPANY LIMITED
    Inventors: Jie CHEN, Chuang LI, Qiang SU, Haobo NI