Abstract: The invention relates to a sensor apparatus, comprising: at least one ferromagnetic element, which, in an operating state, can be arranged on a torque transmission apparatus; and a measuring apparatus, which has at least one measuring element. Each measuring element is configured to measure a ferromagnetic resonance frequency of at least one ferromagnetic element. The measuring apparatus is configured to determine a torque of the torque transmission apparatus on the basis of so a shift in the measured ferromagnetic resonance frequency. The invention further relates to a method for determining a torque of a torque transmission apparatus.

Abstract: In a multi-functional hard material coating of a substrate wherein the hard material coating comprises a single phase crystalline structure including metastable mixed crystals of at least two hard material components which are not soluble in each other and comprise at least one metallic hard material and an ionic hard material whereby the advantages of metallic and ionic hard material components are combined.

Abstract: A device for attenuating reflections of an electromagnetic wave impinging thereon and a method of making the device. The device includes a structured film comprised of at least one of a ferromagnetic and ferrimagnetic material. The structured film has a structure and a uniform film portion of the at least one of a ferromagnetic and ferrimagnetic material underneath the structure such that the structured film has at least two different resonance frequencies.

Abstract: A film and method of preparing a film. The film is made of at least one of ferromagnetic and ferrimagnetic material. An elongated slot is included in the material and is operable to control the domain structure of the material. The depth of the elongated slot is the same as the thickness of the film and the width of the elongated slot is greater than an exchange length of the material. The slot is free from contact with any side of the film.

Abstract: A device for attenuating reflections of an electromagnetic wave impinging thereon and a method of making the device. The device includes a structured film comprised of at least one of a ferromagnetic and ferrimagnetic material. The structured film has a structure and a uniform film portion of the at least one of a ferromagnetic and ferrimagnetic material underneath the structure such that the structured film has at least two different resonance frequencies.

Abstract: In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave beam and a plasma localization unit generating a magnetic field are provided such that the magnetic field and the microwave beam intersect each other in the process chamber. The microwaves are uncoupled onto a concave reflection structure from the focal point thereof so that the microwave beam generated is essentially parallel. An arrangement for generating a magnetic field is movable along the microwave beam axis so that a cross volume between the microwave beam and the magnetic field can be moved along the beam axis whereby the conditions for electron cyclotron resonance are adjustable by displacement of the magnetic field.

Abstract: In a multi-functional hard material coating of a substrate wherein the hard material coating comprises a single phase crystalline structure including metastable mixed crystals of at least two hard material components which are not soluble in each other and comprise at least one metallic hard material and an ionic hard material whereby the advantages of metallic and ionic hard material components are combined.

Abstract: A film and method of preparing a film. The film is made of at least one of ferromagnetic and ferrimagnetic material. An elongated slot is included in the material and is operable to control the domain structure of the material. The depth of the elongated slot is the same as the thickness of the film and the width of the elongated slot is greater than an exchange length of the material. The slot is free from contact with any side of the film.

Abstract: In an arrangement for generating a local electron-cyclotron-microwave-low pressure plasma at a certain location within a gas-filled process chamber, a microwave supply means providing a microwave beam and a plasma localization unit generating a magnetic field are provided such that the magnetic field and the microwave beam intersect each other in the process chamber. The microwaves are uncoupled onto a concave reflection structure from the focal point thereof so that the microwave beam generated is essentially parallel. An arrangement for generating a magnetic field is movable along the microwave beam axis so that a cross volume between the microwave beam and the magnetic field can be moved along the beam axis whereby the conditions for electron cyclotron resonance are adjustable by displacement of the magnetic field.