Patents by Inventor Hari Hedge

Hari Hedge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling film profiles on topographic features
    Patent number: 6716322
    Abstract: A deposition system includes a substrate holder supporting a substrate defining at least one topographical feature. In addition, the system includes a deposition plume that is directed toward the substrate. A first profiler mask is positioned between the deposition plume and the substrate, and is shaped so as to reduce inboard/outboard asymmetry in a deposition profile associated with the feature.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: April 6, 2004
    Assignee: Veeco Instruments Inc.
    Inventors: Hari Hedge, Alan V. Hayes, Boris Druz, Viktor Kanarov, Adrian J. Devasahayam, Emmanuel Lakios