Patents by Inventor Harlan Chung

Harlan Chung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid assisted cryogenic cleaning
    Publication number: 20050217706
    Abstract: The present invention is directed to fluid assisted cryogenic cleaning of a substrate surface requiring precision cleaning such as semiconductors, metals, and dielectric films. The process comprises the steps of applying a fluid selected from the group consisting of high vapor pressure liquids, reactive gases, and vapors of reactive liquids onto the substrate surface followed by or simultaneously with cryogenic cleaning of the substrate surface to remove contaminants.
    Type: Application
    Filed: April 3, 2003
    Publication date: October 6, 2005
    Inventors: Souvik Banerjee, Harlan Chung