Patents by Inventor Harm Rossing

Harm Rossing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Software mechanism for generating flexible equipment state model views, software mechanism for measuring equipment reliability
    Publication number: 20060139587
    Abstract: A state model engine according to one embodiment is configured to dynamically determine Reliability, Availability, and Maintainability data in a lithographic processing system. The engine evaluates whether state changes occur in defined state models, based on transition events published by other state models.
    Type: Application
    Filed: December 23, 2004
    Publication date: June 29, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Harm Rossing, Marco Franssen, Camiel Rouweler
  • METHOD, COMPUTER PROGRAM PRODUCT AND APPARATUS FOR SCHEDULING MAINTENANCE ACTIONS IN A SUBSTRATE PROCESSING SYSTEM
    Publication number: 20050033463
    Abstract: A method of scheduling one or more maintenance actions in at least a part of a substrate processing system is provided. According to an embodiment, the method includes determining a gap in the flow of substrates in a part of the substrate processing system and scheduling one or more maintenance actions to be performed in another part of the substrate processing during a period associated with the gap. An increase of productivity of substrate processing can be achieved through a reduction in downtime in a substrate processing system by appropriate scheduling of maintenance actions.
    Type: Application
    Filed: August 4, 2003
    Publication date: February 10, 2005
    Applicant: ASML NETHERLANDS B. V.
    Inventors: Wim Tel, Harm Rossing, Suzan Auer-Jongepier