Patents by Inventor Harmen Klass Van Der Schoot

Harmen Klass Van Der Schoot has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7034924
    Abstract: A lithographic apparatus includes at least one object support structure in a high vacuum chamber. The object support structure includes a carrier device in which a number of dividing walls are provided forming a number of compartments in the carrier device. At least one of the compartments is shielded from the high vacuum chamber and is provided with separate gas evacuating structures.
    Type: Grant
    Filed: January 12, 2004
    Date of Patent: April 25, 2006
    Assignee: ASLM Netherlands B.V.
    Inventors: Harmen Klass Van Der Schoot, Hernes Jacobs, Martinus Arnoldus Henricus Terken
  • Lithographic apparatus and motor for use in the apparatus
    Publication number: 20040207269
    Abstract: A Lorentz actuator provides a force between a first part and a second part of the apparatus, comprising a main magnet system, attached to a first part of the apparatus and providing a first magnetic field; a subsidiary magnet system, attached to the first part and arranged in a Halbach configuration, providing a second magnetic field; and an electrically conductive element attached to a second part of the apparatus and arranged so as to produce a force between the first and second parts of the apparatus by interaction of an electric current carried by the electrically conductive element and the combination of the first and second magnetic fields.
    Type: Application
    Filed: December 22, 2003
    Publication date: October 21, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Sven Antoin Johan Hol, Jan Van Eijk, Angelo Cesar Peter De Klerk, Harmen Klass Van Der Schoot