Patents by Inventor Harold Anton MEHAGNOUL

Harold Anton MEHAGNOUL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TOOL FOR MODIFYING A SUPPORT SURFACE
    Publication number: 20210263418
    Abstract: A tool for modifying substrate support elements of a substrate holder, the substrate support elements having support surfaces for supporting a substrate, the tool includes a main body having a main body surface, and multiple protrusions from the main body surface, the multiple protrusions having distal ends configured to contact the support surfaces to modify the substrate support elements. Furthermore, a lithographic apparatus and a method comprising such a tool are provided.
    Type: Application
    Filed: June 27, 2019
    Publication date: August 26, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bert Dirk SCHOLTEN, Peter Andreas Maria BILLEKENS, Tiannan GUAN, Tjarco LINDEIJER, Harold Anton MEHAGNOUL, Jimmy Matheus Wilhelmus VAN DE WINKEL, Cas Johannes Petrus Maria VAN NUENEN, Hendrikus Theodorus Jacobus Franciscus VAN VERSEVELD, Marcus Martinus Petrus Adrianus VERMEULEN