Patents by Inventor Harry Gordon-Moys

Harry Gordon-Moys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method
    Patent number: 11710670
    Abstract: A white light illumination source can illuminate a region of a substrate to be plasma etched with an incident light beam. A camera takes successive images of the region being illuminated during a plasma etch process. Image processing techniques can be applied to the images so as to identify a location of at least one feature on the substrate and to measure a reflectivity signal at the location. The plasma etch process can be modified in response to the measured reflectivity signal at the location.
    Type: Grant
    Filed: August 21, 2020
    Date of Patent: July 25, 2023
    Assignee: SPTS Technologies Limited
    Inventors: Oliver Ansell, Harry Gordon-Moys
  • Apparatus and Method
    Publication number: 20210134684
    Abstract: A white light illumination source can illuminate a region of a substrate to be plasma etched with an incident light beam. A camera takes successive images of the region being illuminated during a plasma etch process. Image processing techniques can be applied to the images so as to identify a location of at least one feature on the substrate and to measure a reflectivity signal at the location. The plasma etch process can be modified in response to the measured reflectivity signal at the location.
    Type: Application
    Filed: August 21, 2020
    Publication date: May 6, 2021
    Inventors: Oliver Ansell, Harry Gordon-Moys