Patents by Inventor Harry H. H. M. Cox

Harry H. H. M. Cox has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Servo control method and its application in a lithographic apparatus
    Patent number: 6420716
    Abstract: In a photolithography apparatus, accelerations of the lens unit due to vibrational disturbances are measured and used to derive a control signal which is applied to the positioning means of the wafer table and/or mask table, so as to effect compensating motions of that table. This feedforward system can be optimized to correct for motions of the lens unit in specific frequency bands, e.g. in the vicinity of the eigenfrequency of the lens.
    Type: Grant
    Filed: December 15, 1999
    Date of Patent: July 16, 2002
    Assignee: ASML Netherlands B.V.
    Inventors: Harry H. H. M. Cox, Reinder T. Plug