Patents by Inventor Harry S. Morgan

Harry S. Morgan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for vapor drying
    Patent number: 5351419
    Abstract: A multi-directional flow of isopropyl alcohol vapor is used to uniformly dry a semiconductor substrate. In one embodiment of the invention, isopropyl alcohol vapor (19), which is generated by an external vapor source (30), is injected into the vapor drying system at a location near the top portion (28) of the semiconductor substrate (20), while internally generated isopropyl alcohol vapors (18) are directed toward the bottom portion (26) of the semiconductor substrate (20). Therefore, both the top (28) and the bottom (26) portions of the semiconductor substrate (20) are dried at approximately the same time.
    Type: Grant
    Filed: July 27, 1992
    Date of Patent: October 4, 1994
    Assignee: Motorola, Inc.
    Inventors: John G. Franka, Gary A. DePinto, Ross A. Fisher, Harry S. Morgan