Patents by Inventor Harry Slomowitz

Harry Slomowitz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ignitor for a microwave sustained plasma
    Patent number: 4888088
    Abstract: A high frequency, high voltage is capacitively applied to a process gas through a quartz tube to ignite a glow discharge within the tube. The quartz tube runs through a microwave cavity and the ignitor is positioned upstream of the cavity. The cavity is tuned for a steady state glow discharge and is not changed during initiation of the plasma. The ignitor excites the process gas into active species and the gas flow takes the species through the cavity where the microwave energy brings the gas to an ionized state and the plasma is sustained.
    Type: Grant
    Filed: March 6, 1989
    Date of Patent: December 19, 1989
    Assignee: Tegal Corporation
    Inventor: Harry Slomowitz
  • Pin lift plasma processing
    Patent number: 4624728
    Abstract: A wafer is supported on pins within a plasma reactor, allowing the plasma to act on both sides of the wafer. Various processes are disclosed for pins-up and pins-down condition. If conductive pins are used, they are preferably flattened. The wafer is preferably biased negatively with respect to the plasma.
    Type: Grant
    Filed: June 11, 1985
    Date of Patent: November 25, 1986
    Assignee: Tegal Corporation
    Inventors: Roger M. Bithell, Harry Slomowitz