Patents by Inventor Harry W. K. Tom

Harry W. K. Tom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a semiconductor device, including optical inspection
    Patent number: 5229304
    Abstract: A method for manufacturing a semiconductor device which includes a step of evaluating the dopant profile, in at least the depth dimension, in a processed or partially processed wafer. The evaluation is performed nondestructively, by measuring a differential reflectivity spectrum of the doped portion of the wafer. The resulting spectrum can be related to the Fourier transform of the dopant profile in the depth dimension.
    Type: Grant
    Filed: May 4, 1992
    Date of Patent: July 20, 1993
    Assignee: AT&T Bell Laboratories
    Inventors: Tao-Yuan Chang, Rubens da S. Miranda, Harry W. K. Tom