Patents by Inventor Harshad Shrikrishna Sane

Harshad Shrikrishna Sane has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pointing angle control of electrostatic micro mirrors with modified sliding mode control algorithm for precision control
    Patent number: 6958850
    Abstract: The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk.
    Type: Grant
    Filed: October 1, 2002
    Date of Patent: October 25, 2005
    Assignee: Corning Incorporated
    Inventors: Harshad Shrikrishna Sane, Navid Yazdi, Carlos Horacio Mastrangelo
  • Pointing angle control of electrostatic micro mirrors with modified sliding mode control algorithm for precision control
    Publication number: 20030174376
    Abstract: The present invention is directed to a control system for a MEMS device, such as a MEMS mirror, that uses sliding mode analysis to accurately and predictably control the position of the mirrors in a MEMS device. The present invention also uses the capacitance of the mirror to detect the position of the mirror. In one embodiment, a MEMS mirror device mounted on a substrate is described that includes, a micro mirror that is pivotable about an axis, a first conductive layer on the mirror, a second conductive layer on the substrate, the first and second conductive layers form a first capacitor for determining the position of the mirror. The sliding mode control can be implemented using various drive mechanisms, including electrostatic drives. When used with electrostatic drives, conductive layers that create the capacitors can also be used to drive the mirror. The detection-drive system can be time multiplexed to simplify implementation and to avoid cross talk.
    Type: Application
    Filed: October 1, 2002
    Publication date: September 18, 2003
    Applicant: Corning Incorporated
    Inventors: Harshad Shrikrishna Sane, Navid Yazdi, Carlos Horacio Mastrangelo