Patents by Inventor Hartmut Rick

Hartmut Rick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for determining the temperature of a substrate
    Patent number: 9805993
    Abstract: An apparatus and a method for determining the temperature of a substrate, in particular of a semiconductor substrate during the heating thereof by means of at least one first radiation source are disclosed. A determination of the temperature is based on detecting first and second radiations, each comprising radiation emitted by the substrate due to its own temperature and radiation emitted by the first radiation, which is reflected at the substrate and at least one of a drive power of the first radiation source and the radiation intensity of the first radiation source.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: October 31, 2017
    Assignee: HQ-DIELECTRICS GMBH
    Inventors: Hartmut Rick, Wilfried Lerch, Jürgen Niess
  • DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
    Publication number: 20150087085
    Abstract: An apparatus and a method for determining the temperature of a substrate, in particular of a semiconductor substrate during the heating thereof by means of at least one first radiation source are disclosed. A determination of the temperature is based on detecting first and second radiations, each comprising radiation emitted by the substrate due to its own temperature and radiation emitted by the first radiation, which is reflected at the substrate and at least one of a drive power of the first radiation source and the radiation intensity of the first radiation source.
    Type: Application
    Filed: March 15, 2013
    Publication date: March 26, 2015
    Inventors: Hartmut Rick, Wilfried Lerch, Jürgen Niess