Abstract: The object of the present invention is to achieve the combination processing that accelerates the processing speed while keeping the accuracy of finishing. In the combination processing consisting combination of stationary processing and synchronization processing, the processing of the section in the rows in an processing area is performed from a first end to a second end of a row, and then from the second end to the first end of the next row so that the processing is performed from side to side. The stationary processing is performed in sections having relatively low processing densities and the synchronization processing is performed in the other sections than the sections for the stationary processing.

Abstract: The object of the present invention is to achieve the combination processing that accelerates the processing speed while keeping the accuracy of finishing. In the combination processing consisting combination of stationary processing and synchronization processing, the processing of the section in the rows in an processing area is performed from a first end to a second end of a row, and then from the second end to the first end of the next row so that the processing is performed from side to side. The stationary processing is performed in sections having relatively low processing densities and the synchronization processing is performed in the other sections than the sections for the stationary processing.

Abstract: In a positioning and driving system including a rotating magnetic disk, a magnetic head slider that floats above the surface of the magnetic disk and writes data to and reads data from a track provided on the magnetic disk, an actuator that positions the magnetic head slider in a radial direction of the magnetic disk, and an amplifier that supplies electrical power to the actuator in accordance with the input signal and performs a driving operation, provided is the configuration of an electrothermal actuator driving system that obtains continuous displacement over the entire required operating range with respect to changes in an input voltage by using only one amplifier and that is incorporated into a feedback control system and is suitable for high-speed and high-precision positioning.

Abstract: In a positioning and driving system including a rotating magnetic disk, a magnetic head slider that floats above the surface of the magnetic disk and writes data to and reads data from a track provided on the magnetic disk, an actuator that positions the magnetic head slider in a radial direction of the magnetic disk, and an amplifier that supplies electrical power to the actuator in accordance with the input signal and performs a driving operation, provided is the configuration of an electrothermal actuator driving system that obtains continuous displacement over the entire required operating range with respect to changes in an input voltage by using only one amplifier and that is incorporated into a feedback control system and is suitable for high-speed and high-precision positioning.

Abstract: A scanner has a rotor, and a stator disposed in the outside of the rotor. The rotor includes a shaft, and a permanent magnet mounted on the outer circumferential side of the shaft. The stator includes a casing, a yoke held in the inner circumferential side of the casing, and coils disposed in the inner circumferential side of the yoke. The permanent magnet of the rotor has radially depressed grooves formed in its outer circumferential portion. The torque constant of the scanner is circumferentially equalized by the grooves.

Abstract: A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

Abstract: A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

Abstract: A scanner has a rotor, and a stator disposed in the outside of the rotor. The rotor includes a shaft, and a permanent magnet mounted on the outer circumferential side of the shaft. The stator includes a casing, a yoke held in the inner circumferential side of the casing, and coils disposed in the inner circumferential side of the yoke. The permanent magnet of the rotor has radially depressed grooves formed in its outer circumferential portion. The torque constant of the scanner is circumferentially equalized by the grooves. Thus, positioning accuracy is improved.

Abstract: An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.

Abstract: A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

Abstract: A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

Abstract: An optical scanner which can realize target trajectory tracking machining at a high speed and with a high accuracy. In a servo control circuit controlling the operation of an X-axis scanner for positioning a mirror and the operation of a Y-axis scanner for positioning another mirror, sine wave response is performed at a specific frequency on feedback control for each axis so that the gain characteristic and the phase characteristic of the feedback control are estimated. This arithmetic operation processing is performed by a microprocessor prior to machining, and the results of estimation of the two axes are stored as data for each frequency. In the stage of machining, the results of estimation in terms of the gain characteristic and the phase characteristic are used for correcting the amplitude and phase of a sine wave of a target trajectory in order to cancel each characteristic.

Abstract: A disk storage device comprises a microcomputer for estimating an external disturbance compensation signal and storing it and a first adder for adding the external disturbance compensation signal as a feedforward signal to a positioning compensation signal to a drive circuit. Where a positioning compensator for estimating a velocity signal based on a drive signal is provided, a difference signal between the drive signal and a signal proportional to the external disturbance compensation signal, instead of the drive signal, is applied to velocity estimation unit for correction.

Abstract: A disk drive has a data recording medium disk, a head disposed facing a recording surface of the disk, for reading and writing data, a positioning mechanism for supporting and moving the head, a position detector for detecting the position of the head and outputting a position detection signal, and a control unit for processing the position detection signal and outputting a position control signal to the positioning mechanism.

Abstract: A magnetic disk system utilizes both of voice coil motor and a piezoelectric element provided on a head supporting arm to precisely position a head to a predetermined position on a disk. The piezoelectric element is built in the distal end portion of the head supporting arm and is restricted in respect of its movement by a resilient mechanism which has low rigidity in the driving direction of the piezoelectric element and high rigidity in the other directions. The resilient mechanism is formed by pairs of doubled parallel leaf springs so arranged that each pair is disposed on either side of the piezoelectric element.

Abstract: In a sheet feeding apparatus for transmitting the rotation of the motor shaft of a motor to a sheet feeding shaft for feeding a sheet by an elastic transmission mechanism, a speed state amount of either or both of the motor shaft and sheet shaft is compared to a position deviation signal at the input side of the motor and the resulting deviation signal therebetween is applied to the motor as a motor control signal to control it, thereby improving the dynamic characteristics of the sheet feeding.

Abstract: A velocity feedback circuit for a position servomechanism operative to control the position of a controlled object on the basis of the signal indicative of the difference between the position error and the velocity fed back to the input, wherein a velocity calculating circuit is provided to calculate the velocity to be fed back to the input of the position servomechanism on the basis of the relation between the time required for the controlled variable of the controlled object to make a predetermined change and the predetermined change of the controlled variable.