Abstract: A fluid control apparatus includes: a base plate; and a gas line installed on the base plate. The gas line includes a resin member provided in a predetermined direction on the base plate, a first bracket provided on the resin member, a plurality of joints provided on the first bracket, a plurality of fluid control devices provided to the plurality of joints, and a heater mounted to the plurality of joints and the plurality of fluid control devices. The first bracket includes a first fixing portion fixed to the resin member, a first leg portion extending from the first fixing portion in a direction of away from the base plate, and a first installation portion protruding from an end portion of the first leg portion on an opposite side to the first fixing portion to intersect with the first leg portion and on which the joints are installed.

Abstract: A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.

Abstract: A fluid control apparatus includes: a base plate; and a gas line installed on the base plate. The gas line includes a resin member provided in a predetermined direction on the base plate, a first bracket provided on the resin member, a plurality of joints provided on the first bracket, a plurality of fluid control devices provided to the plurality of joints, and a heater mounted to the plurality of joints and the plurality of fluid control devices. The first bracket includes a first fixing portion fixed to the resin member, a first leg portion extending from the first fixing portion in a direction of away from the base plate, and a first installation portion protruding from an end portion of the first leg portion on an opposite side to the first fixing portion to intersect with the first leg portion and on which the joints are installed.

Abstract: A fluid supply system includes: fluid lines, fluid controllers and joints, in which each of the fluid lines linearly extends in an extension direction that substantially perpendicularly intersects an alignment direction of the fluid lines, each of the fluid controllers is disposed in an aligned manner in the alignment direction with connection surfaces directed to the same direction, a diameter of the pipings is equal to or less than a surface width of the connection surfaces in the alignment direction, and diameters of the joints are equal to or greater than the surface width, and the pipings that are adjacent to each other in the alignment direction are positioned with the joints displaced from each other in the extension direction.

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.

Abstract: A fluid control device includes two opening and closing valves 2, 3 disposed symmetrical to each other and having an identical shape, two fluid discharge passages 6, 7, 11, 12 having an equal length and provided in parallel with each other in outlets of the opening and closing valves 2, 3, and a connection member 10 attachable to a chamber and having two fluid passages 25, 26 formed in an equal length to and communicating with the two fluid discharge passages 6, 7, 11, 12, the connection member being provided in outlets of the two fluid discharge passages 6, 7, 11, 12.