Patents by Inventor Haruhiko Kusonose

Haruhiko Kusonose has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring accuracy with which patterns are written
    Patent number: 5296917
    Abstract: A method of monitoring the accuracy with which patterns are written includes the steps of: disposing in an exposure zone a monitor pattern zone for monitoring accuracy; partitioning the monitor pattern zone into a plurality of fields so that the fields overlap each other; forming checking patterns where the plurality of fields overlap each other; and measuring an alignment accuracy in the checking patterns by exposing the plurality of fields to an electron beam and inspecting the exposed field.
    Type: Grant
    Filed: January 21, 1992
    Date of Patent: March 22, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Haruhiko Kusonose, Hidehiko Kozawa