Abstract: A laser beam irradiation unit of a laser processing apparatus includes a first splitting unit that causes a laser beam emitted from a laser oscillator to branch into a first optical path and a second optical path, a first beam condenser that focuses the laser beam having been introduced to the first optical path, and a second beam condenser that focuses the laser beam having been introduced to the second optical path. The laser beam irradiation unit further includes a second splitting unit on the first optical path between the first splitting unit and the first beam condenser that splits the laser beam into at least two laser beams, and a laser beam scanning unit on the second optical path between the first splitting unit and the second beam condenser that executes scanning with the laser beam and introduces the laser beam to the second beam condenser.

Abstract: A laser beam oscillated by a laser oscillator is condensed by a condenser. The condenser includes: a concave lens; a convex lens disposed at a predetermined interval from the concave lens, and disposed at a position such that aberration of a condensing point in the atmosphere is zero; and an actuator that generates an aberration at the condensing point in the atmosphere by changing the distance of the convex lens with respect to the concave lens. The actuator generates the aberration in the atmosphere such that the aberration of the condensing point is zero within a workpiece.

Abstract: A laser beam oscillated by a laser oscillator is condensed by a condenser. The condenser includes: a concave lens; a convex lens disposed at a predetermined interval from the concave lens, and disposed at a position such that aberration of a condensing point in the atmosphere is zero; and an actuator that generates an aberration at the condensing point in the atmosphere by changing the distance of the convex lens with respect to the concave lens. The actuator generates the aberration in the atmosphere such that the aberration of the condensing point is zero within a workpiece.

Abstract: There is provided a particle detector that can increase a detection sensitivity to fluorescence emitted from biogenic particles. A particle detector for detecting biogenic particles includes a substrate having a principal surface and configured to collect the biogenic particles on the principal surface, a light emitting element configured to irradiate particles collected on the principal surface with excitation light, and a light receiving element configured to receive fluorescence emitted from the particles when the particles are irradiated with the excitation light from the light emitting element. An optical axis of the Fresnel lens and a ray direction of the excitation light intersect with each other. The principal surface is a mirror surface.

Abstract: A particle detection device detects a biological particle. The particle detection device includes a collection sheet, a collection unit, a heating unit, a fluorescence detection unit, and a movement mechanism. The collection unit introduces an airborne particle into the device so that the airborne particle is collected on the collection sheet. The heating unit heats the particle collected on the collection sheet so as to increase fluorescence emitted from the particle. The fluorescence detection unit detects the fluorescence emitted from the particle which is collected on the collection sheet. The movement mechanism moves the collection sheet. With the configuration as described above, the particle detection device with which a measurement time period and the cost of measurement can be reduced can be provided.

Abstract: There is provided a particle detector that can increase a detection sensitivity to fluorescence emitted from biogenic particles. A particle detector for detecting biogenic particles includes a substrate having a principal surface and configured to collect the biogenic particles on the principal surface, a light emitting element configured to irradiate particles collected on the principal surface with excitation light, and a light receiving element configured to receive fluorescence emitted from the particles when the particles are irradiated with the excitation light from the light emitting element. An optical axis of the Fresnel lens and a ray direction of the excitation light intersect with each other. The principal surface is a mirror surface.

Abstract: A Fresnel lens includes an incident surface that is flat, and a prism-forming surface that has a plurality of prisms, the prism-forming surface being provided on the side of the Fresnel lens opposite to the incident surface. Each of the prisms has a converging surface that is located on the side away from the optical axis of the Fresnel lens.

Abstract: There is provided a particle detector that detects biogenic particles with high sensitivity. The particle detector includes a collecting member having a principal surface and configured to electrostatically collect particles on the principal surface, an irradiation unit configured to irradiate the particles collected on the principal surface with excitation light, a light receiving unit configured to receive fluorescence emitted from the particles by irradiation of the particles with the excitation light, and a detection unit configured to detect biogenic particles from the particles collected on the principal surface on the basis of a fluorescence intensity in the light receiving unit. The particle detector further includes a filter disposed between the principal surface and the light receiving unit cut light with a wavelength emitted by irradiation of the excitation light from a substance that is generated on the principal surface when the particles are electrostatically collected.

Abstract: There is provided a particle detector that can increase a detection sensitivity to fluorescence emitted from biogenic particles. A particle detector for detecting biogenic particles includes a substrate having a principal surface and configured to collect the biogenic particles on the principal surface, a light emitting element configured to irradiate particles collected on the principal surface with excitation light, and a light receiving element configured to receive fluorescence emitted from the particles when the particles are irradiated with the excitation light from the light emitting element. An optical axis of the Fresnel lens and a ray direction of the excitation light intersect with each other. The principal surface is a mirror surface.

Abstract: A Fresnel lens includes an incident surface that is flat, and a prism-forming surface that has a plurality of prisms, the prism-forming surface being provided on the side of the Fresnel lens opposite to the incident surface. Each of the prisms has a converging surface that is located on the side away from the optical axis of the Fresnel lens.

Abstract: There is provided a particle detector that can increase a detection sensitivity to fluorescence emitted from biogenic particles. A particle detector for detecting biogenic particles includes a substrate having a principal surface and configured to collect the biogenic particles on the principal surface, a light emitting element configured to irradiate particles collected on the principal surface with excitation light, and a light receiving element configured to receive fluorescence emitted from the particles when the particles are irradiated with the excitation light from the light emitting element. An optical axis of the Fresnel lens and a ray direction of the excitation light intersect with each other. The principal surface is a mirror surface.