Abstract: Using an equipment-classified processing results database, an intercept satisfying a second predetermined condition is derived from intercepts of straight lines that pass through a reference co-ordinate point, which satisfies a first predetermined condition, and respective co-ordinate points in a region bounded by: a line that passes through the reference co-ordinate point and is parallel to an x-axis representing wafer counts X; a y-axis representing processing durations Y; and a line passing through the reference co-ordinate point and the origin. Of co-ordinate points represented by an equipment and recipe-classified processing results database, a gradient satisfying a third predetermined condition is derived from gradients of lines that pass through the derived intercept and each of all co-ordinate points with wafer counts X at or above a predetermined number. A processing duration is derived using a regression equation into which the derived intercept and the derived gradient are substituted.

Abstract: Using an equipment-classified processing results database, an intercept satisfying a second predetermined condition is derived from intercepts of straight lines that pass through a reference co-ordinate point, which satisfies a first predetermined condition, and respective co-ordinate points in a region bounded by: a line that passes through the reference co-ordinate point and is parallel to an x-axis representing wafer counts X; a y-axis representing processing durations Y; and a line passing through the reference co-ordinate point and the origin. Of co-ordinate points represented by an equipment and recipe-classified processing results database, a gradient satisfying a third predetermined condition is derived from gradients of lines that pass through the derived intercept and each of all co-ordinate points with wafer counts X at or above a predetermined number. A processing duration is derived using a regression equation into which the derived intercept and the derived gradient are substituted.