Abstract: A multilayer ceramic substrate includes a plurality of ceramic layers laminated each other. The plurality of ceramic layers form a bulge and a cavity having such a shape that an opening area of the cavity gradually becomes smaller toward a bottom of the cavity.

Abstract: A multilayer ceramic substrate having a cavity is formed by the steps of laminating a plurality of ceramic green sheets including ceramic green sheets having through holes corresponding to the cavity to form a multilayer body, pressing the multilayer body and firing the pressed body. At this time, a shrinkage suppression green sheet is laminated on the surface of the a ceramic green sheet constituting the outermost layer of the multilayer body, and a shrinkage suppression green sheet piece is disposed on the ceramic green sheet exposed to the bottom of the cavity in accordance with the shape of the cavity. A burnable sheet is further disposed on the shrinkage suppression green sheet piece. Before the pressing step, an embedded green sheet separate from the ceramic green sheets (portion separated by inserting a cut) is disposed on the shrinkage suppression green sheet piece or the burnable sheet so that it is filled in the cavity. After the firing step, the embedded green sheet fired is removed.

Abstract: A multilayer ceramic substrate includes a plurality of ceramic layers laminated each other. The plurality of ceramic layers form a bulge and a cavity having such a shape that an opening area of the cavity gradually becomes smaller toward a bottom of the cavity.

Abstract: An object of the invention is to connect different dielectrics electrically to each other in the direction of main surface of a sheet in a multilayer ceramic substrate and to increase the degree of flexibility in design and make the multilayer ceramic substrate compact in size. A multilayer ceramic substrate in accordance with the invention is formed of a plurality of laminated ceramic substrates including such a composite ceramic substrate of different materials that is made by inserting the second ceramic substrate in a pounched-out portion made in the first ceramic substrate and by planarizing its top and bottom surfaces, wherein a conductive layer is formed in a portion across a boundary between the first ceramic substrate and the second ceramic substrate of the interface of the composite ceramic substrate of different materials.

Abstract: An object of the invention is to connect different dielectrics electrically to each other in the direction of main surface of a sheet in a multilayer ceramic substrate and to increase the degree of flexibility in design and make the multilayer ceramic substrate compact in size. A multilayer ceramic substrate in accordance with the invention is formed of a plurality of laminated ceramic substrates including such a composite ceramic substrate of different materials that is made by inserting the second ceramic substrate in a pounched-out portion made in the first ceramic substrate and by planarizing its top and bottom surfaces, wherein a conductive layer is formed in a portion across a boundary between the first ceramic substrate and the second ceramic substrate of the interface of the composite ceramic substrate of different materials.

Abstract: A method for producing a multilayer ceramic substrate having a cavity formed therein includes punching a through opening corresponding to the cavity in green sheets constituting a laminate, and printing a conductor at a predetermined position of the green sheets, laminating the green sheets to constitute a green sheet laminate, and applying a pressure to the green sheet laminate by using a compression member having a projection at a position corresponding to the cavity to thereby compress the green sheet laminate. The projection has a height which is equal to the depth of the cavity multiplied by compression ratio of the green sheet laminate, and the green sheet laminate is compressed by applying the pressure such that compression ratio of the bottom of the cavity is identical with the compression ratio of other parts of the green sheet laminate.

Abstract: A multilayer ceramic substrate having a cavity is formed by the steps of laminating a plurality of ceramic green sheets including ceramic green sheets having through holes corresponding to the cavity to form a multilayer body, pressing the multilayer body and firing the pressed body. At this time, a shrinkage suppression green sheet is laminated on the surface of the a ceramic green sheet constituting the outermost layer of the multilayer body, and a shrinkage suppression green sheet piece is disposed on the ceramic green sheet exposed to the bottom of the cavity in accordance with the shape of the cavity. A burnable sheet is further disposed on the shrinkage suppression green sheet piece. Before the pressing step, an embedded green sheet separate from the ceramic green sheets (portion separated by inserting a cut) is disposed on the shrinkage suppression green sheet piece or the burnable sheet so that it is filled in the cavity. After the firing step, the embedded green sheet fired is removed.

Abstract: A plurality of first green sheets forming first ceramic layers after firing are stacked to form a first pre-fired substrate 4. Next, a plurality of second green sheets forming second ceramic layers after firing are stacked to form a second pre-fired substrate. Next, the first pre-fired substrate 4 is formed with recesses 10. Next, first pre-fired blocks 6 of sizes fitting into the recesses are formed from the second pre-fired substrate. The first pre-fired blocks 6 are fit into the recesses 10 so that the stacking direction A of the first green sheets and the stacking direction A? of the second green sheets become the same. The first pre-fired substrate 4 in which the first pre-fired blocks 6 are fit is fired.

Abstract: An object of the invention is to connect different dielectrics electrically to each other in the direction of main surface of a sheet in a multilayer ceramic substrate and to increase the degree of flexibility in design and make the multilayer ceramic substrate compact in size. A multilayer ceramic substrate in accordance with the invention is formed of a plurality of laminated ceramic substrates including such a composite ceramic substrate of different materials that is made by inserting the second ceramic substrate in a pounched-out portion made in the first ceramic substrate and by planarizing its top and bottom surfaces, wherein a conductive layer is formed in a portion across a boundary between the first ceramic substrate and the second ceramic substrate of the interface of the composite ceramic substrate of different materials.

Abstract: This invention provides a multilayer ceramic substrate which has a consistent quality, and which has with no swelling or collapse in the inner periphery of the cavity, wherein the bottom of the cavity is flat to enable stable packaging of the desired device at a high precision, and wherein L and C can be formed by the internal conductor at a high precision; and a method for producing a multilayer ceramic substrate and an apparatus therefor by which a multilayer ceramic substrate can be readily produced in a simple procedure by using an apparatus of simple structure.

Abstract: A process for the desulfurization of a sulfurous acid gas-containing waste gas by blowing the waste contact into an absorbing liquid through a plurality of sparger pipes is disclosed, wherein various operation conditions are specifically correlatively controlled to carry out the desulfurization in a stable manner at minimum costs.

Abstract: A wet-process stack gas purification method and apparatus wherein stack gas is scrubbed by bubbling it into a first scrubbing liquid while maintaining the level of the first scrubbing liquid. The above scrubbed gas is subjected to a counter-current contact with a second scrubbing liquid in a scrubbing tower to further purify the gas. The method and apparatus can attain a highly remarkable decontamination effect, and the apparatus is simple in structure and small in size.

Abstract: An externally cooled cylindrical vessel has a draft tube centered in the lower half thereof. A continuous circulation seeded with tartars crystals includes a fast downward flow through the draft tube and a slow upward flow outside the draft tube. The circulation induces crystal growth and the removal of tartars from the liquid. A coning zone is defined in the vessel above the draft tube. The slow upward flow moves toward the calming zone, facilitating classification of the crystalline matter which is reintroduced into the fact downward flow. The liquid product from which the tartars has been removed and which is collected in the upper section of the vessel is tapped off by an overflow port located near the top of the vessel.

Abstract: An externally cooled cylindrical vessel has a draft tube centered in the lower half thereof. A continuous circulation seeded with tartars crystals includes a fast downward flow through the draft tube and a slow upward flow outside the draft tube. The circulation induces crystal growth and the removal of tartars from the liquid. A coning zone is defined in the vessel above the draft tube. The slow upward flow moves toward the calming zone, facilitating classification of the crystalline matter which is reintroduced into the fact downward flow. The liquid product from which the tartars has been removed and which is collected in the upper section of the vessel is tapped off by an overflow port located near the top of the vessel.

Abstract: Disclosed is an incinerating and melting apparatus for processing materials such as organic matters, inorganic matters and metals, which apparatus has a cylindrical or polygonal horizontal furnace body provided with a material charging port and a melt discharge port formed in the wall thereof, wherein a burner is mounted in the inner surface of the furnace body, the furnace body is oscillatorily rotatable in one and the other directions about its axis, and a melt receiver is detachably secured to the melt discharge port, or wherein the furnace body is fitted in a hood into which the melt discharge port opens and the melt receiver is detachably secured to the hood.

Abstract: Waste gas containing sulfur oxide (SO.sub.x) and nitrogen oxide (NO.sub.x) is mixed with an ozone-containing gas to have the value x of NO.sub.x fall in the range of 1.2 to 2.5 and thereafter brought into contact with an aqueous solution containing sulfuric acid, nitric acid and an iron compound to be deprived of SO.sub.x and NO.sub.x. To the solution with which the waste gas has been brought into contact, air or oxygen is added to effect oxidation of the part of said oxides still remaining therein in an unoxidized state and regenerate the activity of the iron compound functioning as a catalyst. Part of the solution to which the addition of air or oxygen has been made is recycled as the solution for the purpose of contact with waste gas.