Abstract: Disclosed is nanoimprint technology that enables the transfer of fine patterns to the surfaces of various molding materials, including general-purpose engineering plastic, in a short manufacturing process time. Embodiments of the present invention include a nanoimprint method for transferring fine patterns of a mold surface to a molding material by pressing the mold against the molding material while applying ultrasonic vibrations that propagate in the direction of application of a load, where the application of the ultrasonic vibrations and the load is started without heating said molding material to glass-transition temperature and, during at least the application of ultrasonic vibrations, said mold is fixed to the application mechanism of said ultrasonic vibrations.

Abstract: A nanoimprint system according to one embodiment of the present invention is a system for performing a pattern transfer onto an object to be molded by pressing a mold against the object to be molded using a head, characterized in that the head has a flat pressing surface during pressing the mold and is slid onto the mold while pressing the mold.