Abstract: A method (10) for etching a through via (116, 118) on a wafer (100) of semiconductor material (102), wherein the wafer (100) has a front side surface (110) and a backside surface (106), is described. A layer of photoresist material (104) is applied to the backside surface (106). The layer of photoresist (104) is then exposed to a light source through a mask having a pre-selected pattern, wherein the developed photoresist is removed to form at least one via (112, 114) in the remaining photoresist layer (104). The remaining photoresist layer (104?) is then baked in order to form a hardened, remaining photoresist layer (104?). The semiconductor material 102 adjacent to the at least one via (112, 114) is then gas plasma etched to form a through via (116, 118) between the backside surface (106) and the front side surface (110).

Abstract: A system transmits two audio services, each related to a different video program, within the bandwidth typically reserved for a single audio channel. Each audio service may be processed as a mono, stereo or encrypted signal prior to modulation onto its own audio carrier. The two audio carriers are summed together and applied to an RF modulator. The frequencies of the audio carriers are selected to ensure that the quality of the video program is not degraded, the video channel mask bandwidth is not exceeded and interference from the unselected audio carrier is negligible.

Abstract: Supplying gases towards the web as it separates from the drum in a plasma-enhanced chemical vapor deposition system reduces the sticking of the web to the drum, and thus prevents power supply dropouts. The gas supplied can form into a plasma that helps dissipate the static charge which builds onto the web as it rolls off of the drum. By reducing the arcing and power supply dropouts, the quality of the deposited layer formed in a deposition zone can be improved.

Abstract: Supplying gases towards the web as it separates from the drum in a plasma-enhanced chemical vapor deposition system reduces the sticking of the web to the drum, and thus prevents power supply dropouts. The gas supplied can form into a plasma that helps dissipate the static charge which builds onto the web as it rolls off of the drum. By reducing the arcing and power supply dropouts, the quality of the deposited layer formed in a deposition zone can be improved.