Patents by Inventor Hashimoto Kohei

Hashimoto Kohei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light source device and semiconductor manufacturing apparatus including the same
    Patent number: 9425036
    Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.
    Type: Grant
    Filed: January 9, 2014
    Date of Patent: August 23, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Wook-Rae Kim, Hashimoto Kohei, Won-Don Joo, Kwang-Soo Kim, Byeong-Hwan Jeon, Sue-Jin Cho
  • Plasma light source apparatus and plasma light generating method
    Patent number: 9374883
    Abstract: A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: June 21, 2016
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Young-Kyu Park, Wook-Rae Kim, Byeong-Hwan Jeon, Hashimoto Kohei
  • PLASMA LIGHT SOURCE APPARATUS AND PLASMA LIGHT GENERATING METHOD
    Publication number: 20150163893
    Abstract: A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.
    Type: Application
    Filed: December 4, 2014
    Publication date: June 11, 2015
    Inventors: YOUNG-KYU PARK, WOOK-RAE KIM, BYEONG-HWAN JEON, HASHIMOTO KOHEI
  • LIGHT SOURCE DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME
    Publication number: 20140239795
    Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.
    Type: Application
    Filed: January 9, 2014
    Publication date: August 28, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: WOOK-RAE KIM, Hashimoto Kohei, Won-Don Joo, Kwang-Soo Kim, Byeong-Hwan Jeon, Sue-Jin Cho