Abstract: Provided is a roller bearing device, which is suitable for preventing misdetection of a rotation sensor when a moment load is applied. A thin motor 100 includes a cross roller bearing 14 having an inner ring 14a and an outer ring 14b, a stator 22 supported by the inner ring 14a, a rotor 12 supported by the outer ring 14b, a motor unit 16 that applies rotation torque to the rotor 12, and a resolver 30 that detects a rotation angle position of the rotor 12. The resolver 30, the cross roller bearing 14, and the motor unit 16 are arranged in the recited order from the radially inner side on a radially identical plane.

Abstract: Provided is a roller bearing device, which is suitable for preventing misdetection of a rotation sensor when a moment load is applied. A thin motor 100 includes a cross roller bearing 14 having an inner ring 14a and an outer ring 14b, a stator 22 supported by the inner ring 14a, a rotor 12 supported by the outer ring 14b, a motor unit 16 that applies rotation torque to the rotor 12, and a resolver 30 that detects a rotation angle position of the rotor 12. The resolver 30, the cross roller bearing 14, and the motor unit 16 are arranged in the recited order from the radially inner side on a radially identical plane.

Abstract: Provided is a roller bearing device, which is suitable for preventing misdetection of a rotation sensor when a moment load is applied. A thin motor 100 includes a cross roller bearing 14 having an inner ring 14a and an outer ring 14b, a stator 22 supported by the inner ring 14a, a rotor 12 supported by the outer ring 14b, a motor unit 16 that applies rotation torque to the rotor 12, and a resolver 30 that detects a rotation angle position of the rotor 12. The resolver 30, the cross roller bearing 14, and the motor unit 16 are arranged in the recited order from the radially inner side on a radially identical plane.

Abstract: Provided is a roller bearing device, which is suitable for preventing misdetection of a rotation sensor when a moment load is applied. A thin motor 100 includes a cross roller bearing 14 having an inner ring 14a and an outer ring 14b, a stator 22 supported by the inner ring 14a, a rotor 12 supported by the outer ring 14b, a motor unit 16 that applies rotation torque to the rotor 12, and a resolver 30 that detects a rotation angle position of the rotor 12. The resolver 30, the cross roller bearing 14, and the motor unit 16 are arranged in the recited order from the radially inner side on a radially identical plane.

Abstract: Provided is a roller bearing device, which is suitable for preventing misdetection of a rotation sensor when a moment load is applied. A thin motor 100 includes a cross roller bearing 14 having an inner ring 14a and an outer ring 14b, a stator 22 supported by the inner ring 14a, a rotor 12 supported by the outer ring 14b, a motor unit 16 that applies rotation torque to the rotor 12, and a resolver 30 that detects a rotation angle position of the rotor 12. The resolver 30, the cross roller bearing 14, and the motor unit 16 are arranged in the recited order from the radially inner side on a radially identical plane.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: An angle adjusting device configured to support an operations panel so that up and down rotation of the operations panel against an apparatus main body can be made in a designated angle range and configured to adjust a rotational angle of the operations panel in up and down directions against the apparatus main body, the angle adjusting device includes i) a fixing member fixed to the apparatus main body, ii) a rotation member where the operations panel is provided, the rotation member being provided to the fixing member so as to be rotated with respect to a designated rotation shaft in the designated angle range, iii) a lock mechanism configured to lock rotation of the rotation member against the fixing member with respect to the rotation shaft, at one or more parts in the designated angle range, by using a force other than a frictional force between the fixing member and the rotation member, and iv) a setting mechanism configured to set a lock-on state and lock-off state of the lock mechanism.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: Bearings for rotatably supporting a rotor are disposed on an inner side of a hollow cylindrical portion of the rotor which is disposed in a rotating magnetic field formed by a group of stator windings and on an outer periphery of which magnetic poles for generating torque are arranged, thereby shortening the axial length of the rotor and making a motor compact. A motor of the invention includes: a stator in which a plurality of split cores with windings wound therearound are arranged in an annular form to generate a rotating magnetic field; a rotor for generating torque by the rotating magnetic field; and a housing for fixing the stator and for rotatably holding the rotor at an annularly central position of the stator, wherein only one end side of the stator is fixed to the housing.

Abstract: A arm 4 or 104 comprises a heat conduction suppressing portion such as cut-out grooves 8 or a low-temperature melting substance which suppresses conduction of heat. The heat conduction suppressing portion is disposed between a tip end portion of a front end arm 4 or 104 coupled to a mounting member 5 for a wafer W, and a basal portion of the front end arm 4 or 104. The substrate transfer apparatus according to the present invention can accurately transfer a substrate such as a semiconductor wafer for a long term while suppressing an influence of heat from a film growth apparatus or the like, to a level as low as possible.

Abstract: A sealed actuator includes a motor stator having rotation-drive magnetic poles; a motor rotor arranged so as to confront magnetic pole surfaces of the motor stator while interposing a small distance therebetween and rotatably supported through roller bearings; and displacement detecting means for measuring displacement of the motor rotor. A partition wall made of a nonmagnetic metal is disposed in a clearance between the motor stator and the motor rotor, so that the inner space where the motor stator is disposed is hermetically covered. The bearings are disposed at both sides of the partition wall in the axial direction so that the load applied to the bearings are directly received by a housing. At least a part of the partition wall is reinforced by reinforcing members and a mold agent is charged into the space on the motor stator side.

Abstract: This invention provides a rotary indexing device which applies a uniform pressing force radially on a rotational shaft without applying any force axially thereon.

Abstract: A sealed actuator includes a motor stator having rotation-drive magnetic poles; a motor rotor arranged so as to confront magnetic pole surfaces of the motor stator while interposing a small distance therebetween and rotatably supported through roller bearings; and displacement detecting means for measuring displacement of the motor rotor. A partition wall made of a nonmagnetic metal is disposed in a clearance between the motor stator and the motor rotor, so that the inner space where the motor stator is disposed is hermetically covered. The bearings are disposed at both sides of the partition wall in the axial direction so that the load applied to the bearings are directly received by a housing. At least a part of the partition wall is reinforced by reinforcing members and a mold agent is charged into the space on the motor stator side.