Patents by Inventor Hayato Itomi

Hayato Itomi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VACUUM TRANSFER DEVICE AND METHOD FOR CONTROLLING VACUUM TRANSFER DEVICE
    Publication number: 20220288796
    Abstract: A vacuum transfer device, which is arranged between a process chamber and a load lock chamber and transfers a substrate between the process chamber and the load lock chamber, includes a container, a transfer device, an exhaust device, a dew-point meter, and a control device. The container is connected to each of the process chamber and the load lock chamber via a gate valve. The transfer device is provided inside the container and transfers the substrate between the process chamber and the load lock chamber. The exhaust device exhausts a gas in the container. The dew-point meter measures a dew-point temperature of the gas in the container. The control device determines whether a process is ready to be executed, based on the dew-point temperature measured by the dew-point meter, and when the process is ready to be executed, notifies that fact to a user of the vacuum transfer device.
    Type: Application
    Filed: September 11, 2020
    Publication date: September 15, 2022
    Inventors: Seiji ISHIBASHI, Hayato ITOMI, Hiroyuki TAKAHASHI
  • Cooling mechanism and processing system
    Patent number: 10256128
    Abstract: A cooling mechanism includes a plurality of support stands which is provided in a vertical direction over a plurality of stages in an atmospheric transfer chamber where a down-flow is formed, a plurality of support pins which is provided in each of the support stands and supports a target object in contact with the backside of the target object. The cooling mechanism further includes a plurality of air guide plates which is provided in the support stands and cools the target object supported by the support stand located at a lower stage using the down-flow.
    Type: Grant
    Filed: May 2, 2013
    Date of Patent: April 9, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Keita Kumagai, Yoshiaki Sasaki, Hirohito Kikushima, Hayato Itomi
  • COOLING MECHANISM AND PROCESSING SYSTEM
    Publication number: 20150133044
    Abstract: A cooling mechanism includes a plurality of support stands which is provided in a vertical direction over a plurality of stages in an atmospheric transfer chamber where a down-flow is formed, a plurality of support pins which is provided in each of the support stands and supports a target object in contact with the backside of the target object. The cooling mechanism further includes a plurality of air guide plates which is provided in the support stands and cools the target object supported by the support stand located at a lower stage using the down-flow.
    Type: Application
    Filed: May 2, 2013
    Publication date: May 14, 2015
    Inventors: Keita Kumagai, Yoshiaki Sasaki, Hirohito Kikushima, Hayato Itomi