Patents by Inventor Hayato KIYOMI

Hayato KIYOMI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support frame for pellicle
    Patent number: 10437142
    Abstract: A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.
    Type: Grant
    Filed: March 2, 2016
    Date of Patent: October 8, 2019
    Assignee: NIPPON LIGHT METAL COMPANY, LTD.
    Inventors: Akira Iizuka, Koichi Nakano, Hayato Kiyomi, Kazuhiro Oda, Tomohiro Isobe
  • Support frame for pellicle
    Patent number: 10281814
    Abstract: A support frame for a pellicle, in which a pellicle film is adhered to the front surface of an aluminum-alloy frame body, and a transparent substrate is adhered to the rear surface of the frame body. A recessed groove is formed in the rear surface of the frame body, the recessed groove extending along the periphery of the frame body, and a vent hole is formed from the outer peripheral surface of the frame body to the inner surface of the recessed groove. With this configuration, deformation of the support frame can be suppressed when the support frame is removed from the transparent substrate.
    Type: Grant
    Filed: October 29, 2015
    Date of Patent: May 7, 2019
    Assignee: NIPPON LIGHT METAL COMPANY, LTD.
    Inventors: Hayato Kiyomi, Naoto Komura
  • SUPPORT FRAME FOR PELLICLE
    Publication number: 20180149965
    Abstract: A support frame for a pellicle includes a frame body made of an aluminum alloy. The frame body has: a top surface onto which a pellicle film is bonded; and an underside surface onto which a transparent substrate is bonded. A material of which the frame body is made has a Young's modulus larger than that of which the transparent substrate is made. The structure described above makes it possible to reduce deformation of the transparent substrate.
    Type: Application
    Filed: March 2, 2016
    Publication date: May 31, 2018
    Inventors: Akira IIZUKA, Koichi NAKANO, Hayato KIYOMI, Kazuhiro ODA, Tomohiro ISOBE
  • SUPPORT FRAME FOR PELLICLE
    Publication number: 20180011396
    Abstract: A support frame for a pellicle, in which a pellicle film is adhered to the front surface of an aluminum-alloy frame body, and a transparent substrate is adhered to the rear surface of the frame body. A recessed groove is formed in the rear surface of the frame body, the recessed groove extending along the periphery of the frame body, and a vent hole is formed from the outer peripheral surface of the frame body to the inner surface of the recessed groove. With this configuration, deformation of the support frame can be suppressed when the support frame is removed from the transparent substrate.
    Type: Application
    Filed: October 29, 2015
    Publication date: January 11, 2018
    Applicant: Nippon Light Metal Company, Ltd.
    Inventors: Hayato KIYOMI, Naoto KOMURA