Patents by Inventor He-Ming Chuang

He-Ming Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pump line with nickel-chromium heater layer
    Publication number: 20060021571
    Abstract: A vacuum pump line for a process chamber is disclosed. The vacuum pump line includes a pump line wall and a heater layer comprising a nickel-chromium alloy surrounding the pump line wall for heating the pump line wall. A method for fabricating a pump line for a process chamber is also disclosed.
    Type: Application
    Filed: July 28, 2004
    Publication date: February 2, 2006
    Inventors: Sheng-Hsiung Tseng, Yao-Pin Huang, Ming-Huang Wu, Chang-Jung Su, Stone Shyr, Yuan-Hung Chang, He-Ming Chuang