Patents by Inventor Hector T. H. Chen

Hector T. H. Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Planar uniform heating surface with additional circumscribing ring
    Patent number: 5590239
    Abstract: A uniform heating fixture and method of use is provided. A heat conductive member having a first plane surface, a second surface and a third plane surface is formed. The first plane surface and the third plane surface are parallel and are connected by a second surface. The third plane surface circumscribes and extends away from the first plane surface, thereby enabling uniform heating of an X-ray mask.
    Type: Grant
    Filed: June 6, 1994
    Date of Patent: December 31, 1996
    Assignee: Motorola
    Inventors: Douglas J. Resnick, William A. Johnson, Kevin D. Cummings, Hector T. H. Chen
  • X-ray lithography method for irradiating an object to form a pattern thereon
    Patent number: 5509041
    Abstract: An x-ray lithography method for irradiating an object (14) to form a pattern thereon uses an x-ray mask (10) having a membrane (18). The membrane (18) has an open membrane surface (26), and x-ray radiation (16) is passed through the open membrane surface (26) to irradiate the object (14). During this irradiation, the open membrane surface (26) is substantially uniformly exposed to the x-ray radiation (16) so that stress-induced distortion of the membrane (18) is reduced.
    Type: Grant
    Filed: June 30, 1994
    Date of Patent: April 16, 1996
    Assignee: Motorola, Inc.
    Inventors: Douglas J. Resnick, William A. Johnson, Hector T. H. Chen