Patents by Inventor Heejae Byun

Heejae Byun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transport robot and substrate treating apparatus comprising the same
    Patent number: 11702299
    Abstract: Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.
    Type: Grant
    Filed: June 25, 2020
    Date of Patent: July 18, 2023
    Assignee: Semes Co., Ltd.
    Inventors: Sang-Oh Kim, Jun Ho Song, Myungjin Lee, Heejae Byun
  • TOWER LIFT, TOWER LIFT DRIVING METHOD, AND MACHINE READABLE MEDIUM
    Publication number: 20210300693
    Abstract: A tower lift includes a rail module extending in a vertical direction, a plurality of carriage modules that are movable along the rail module, each carriage module having a carriage that carries an object, and an interference avoidance module that avoids travel interference between the carriage modules that move along the rail module.
    Type: Application
    Filed: March 10, 2021
    Publication date: September 30, 2021
    Applicant: SEMES CO., LTD.
    Inventors: NA HYUN LEE, SANG-OH KIM, MYUNGJIN LEE, HEEJAE BYUN
  • TRANSPORT ROBOT AND SUBSTRATE TREATING APPARATUS COMPRISING THE SAME
    Publication number: 20200407179
    Abstract: Provided is a transport robot and a substrate treating apparatus including the transport robot. The substrate treating apparatus includes a transport chamber having a long shape on one side, and for providing a moving space of a substrate, a load lock chamber connected to the transport chamber to provide an exchange space between the transport chamber and a substrate before a process or a substrate after a process, a process unit connected to the transport chamber to perform a process for a substrate transferred from the transport chamber, a track provided in the transport chamber to provide a moving path of a substrate, and a transport robot capable of moving along the track in a non-contact manner, and entering or exiting the load lock chamber to perform a substrate exchange between the load lock chamber and the transport chamber.
    Type: Application
    Filed: June 25, 2020
    Publication date: December 31, 2020
    Inventors: Sang-Oh Kim, Jun Ho Song, Myungjin Lee, Heejae Byun