Abstract: Disclosed herein is a method including: performing eddy current testing on a steam generator tube material by using a motorized rotating pancake coil (MRPC) probe, evaluating a test signal measured using the eddy current testing, and predicting the corrosion rate of the steam generator tube material from a noise value in the MRPC inspection signal of the steam generator tube obtained from the evaluating. When the prediction method of a corrosion rate of a steam generator tube according to the present invention is used, the steam generator tube material which has low corrosion rate can be selected at the material selecting step because the corrosion rate can be predicted and the criterions on the corrosion rate of the steam generator tube can be established as the requirements through an eddy current MRPC noise inspection of the steam generator tube material.

Abstract: Disclosed herein is a method including: performing eddy current testing on a steam generator tube material by using a motorized rotating pancake coil (MRPC) probe, evaluating a test signal measured using the eddy current testing, and predicting the corrosion rate of the steam generator tube material from a noise value in the MRPC inspection signal of the steam generator tube obtained from the evaluating. When the prediction method of a corrosion rate of a steam generator tube according to the present invention is used, the steam generator tube material which has low corrosion rate can be selected at the material selecting step because the corrosion rate can be predicted and the criterions on the corrosion rate of the steam generator tube can be established as the requirements through an eddy current MRPC noise inspection of the steam generator tube material.

Abstract: The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.

Abstract: A fabrication processing system is used to produce copper indium gallium selenide (CuIn1-xGaxSe2 or CIGS) thin film solar cells, more particularly to a fabrication processing system CIGS of thin film solar cells, equipped with real-time analysis facilities for profiling the elemental components of CIGS thin film using laser-induced breakdown spectroscopy. The system provides a process control system for determining whether abnormalities are present or not by measuring a physical and chemical properties on a continuous production process lines of CIGS thin film solar cell in real time, and performs a production and quality management at the same time by providing a feedback to CIGS fabrication process.

Abstract: A scribing apparatus having a function to analyze distribution of a material forming a semiconductor or solar cell in real-time in a process producing the semiconductor or solar cell of is disclosed. The scribing apparatus having the analysis function of material distribution comprises: a laser irradiation unit, which conducts scribing by irradiating laser to a position to be scribed of an analysis subject; a spectrum detection optical unit, which detects a spectrum generated from plasma, which is produced by the irradiated laser; a spectrum information storage, which stores spectrum state information of each material forming the analysis subject; and a spectrum analysis unit, which analyzes distribution state information of the material by comparing the spectrum state information and the detected spectrum.

Abstract: The present invention relatives to a fabrication processing system of CIGS thin film solar cell, more particularly to a fabrication processing system CIGS of thin film solar cell equipped with real-time analysis facilities for profiling the elemental components of CIGS thin film using laser-induced breakdown spectroscopy. The system of the present invention is to provide a process control system for determining whether abnormalities are present or not by measuring a physical and chemical properties on a continuous production process lines of CIGS thin film solar cell in real time, and performing a production and quality management at the same time by providing a feedback to CIGS fabrication process.

Abstract: The present invention relates to a process control system which can measure the physical properties of a CIGS thin film in real-time in a continuous production line of a CIGS thin film solar cell, more specifically to a system for real-time analysis of material distribution of a CIGS thin film comprising: a header, which comprises a laser irradiation unit producing plasma from the CIGS thin film by irradiating a laser beam to a part of the CIGS thin film; and a spectrum detection optical unit detecting a spectrum generated from the plasma; a transfer unit, which transfers the header at the same rate and to the direction with the transfer rate and direction of the CIGS thin film; and a spectrum analysis unit, which analyzes the spectrum detected by the spectrum detection optical unit.