Abstract: An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.

Abstract: A sample inspection apparatus to inspect a sample using a scanning electron microscope irradiates the sample with electron beams. The sample inspection apparatus includes a charge collecting unit that collects charges generated from a surface of the sample due to irradiation thereof by the electron beams. The cost required for sample inspection is reduced, and an image having high quality is provided by the sample inspection apparatus.

Abstract: An inspecting apparatus and method of inspecting which provides an enhanced clearness. The inspecting apparatus includes a stage to support an article to be inspected, an optical microscope provided with an object lens to approach and withdraw from the stage to inspect the article, and a viewport lens interposed between the article and the object lens to have a predetermined radius of curvature.

Abstract: An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.