Abstract: An apparatus and method for processing a substrate can reduce the concentration of process by-products in a chemical solution.

Abstract: A semiconductor memory device includes a lower stacked structure with lower metal lines on a substrate, an upper stacked structure with an upper metal line on the lower stacked structure, a vertical structure penetrating the upper and lower stacked structures and including a channel layer, a first cutting line through the upper and lower stacked structures, an upper supporter in a recess on the first cutting line, a second cutting line through the upper and lower stacked structures and spaced apart from the first cutting line, a sub-cutting line through the upper stacked structure while at least partially overlapping the vertical structure in the vertical direction, the sub-cutting line being between the first and second cutting lines, top surfaces of the upper supporter and sub-cutting line being coplanar, and a first interlayer insulating layer surrounding a sidewall of each of the upper supporter and the sub-cutting line.

Abstract: There are provided a biodegradable mulching-mat for preventing weed in rice cultivation having improved biodegradability to be completely degraded in several months, good mulching properties of preventing the growth of weeds, elevating soil temperature and increasing soil moisture capacity, and good strength and durability; and a method for manufacturing said mulching-mat by means of extrusion molding.

Abstract: A method and apparatus for generating uniformly sized spherical ice particles. The apparatus comprises a water feed pump, a vacuum chamber connected to the water feed pump and having a water spray nozzle, boosters discharging the vapor from the vacuum chamber to maintain the inside of the vacuum chamber below a desired pressure and compressing it, a condenser for condensing the vapor being compressed by the boosters, and a vacuum pump for removing noncondensable gases from the condenser.