Patents by Inventor Hee-Won Sunwoo

Hee-Won Sunwoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for detecting defect of substrate
    Patent number: 8890069
    Abstract: A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the first region may be the same or different from the electron beam irradiated into the second region. Alternatively, different beams may be simultaneously irradiated into the first and second regions. An image generated based on the secondary electrons shows a defect in the substrate as a region having a grayscale difference with other regions in the image.
    Type: Grant
    Filed: March 31, 2014
    Date of Patent: November 18, 2014
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jong-Cheon Sun, Hyung-Seop Kim, Hee-Won Sunwoo, Byoung-Ho Lee, Dong-Chul Ihm, Soo-Bok Chin
  • METHOD FOR DETECTING DEFECT OF SUBSTRATE
    Publication number: 20140306109
    Abstract: A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the first region may be the same or different from the electron beam irradiated into the second region. Alternatively, different beams may be simultaneously irradiated into the first and second regions. An image generated based on the secondary electrons shows a defect in the substrate as a region having a grayscale difference with other regions in the image.
    Type: Application
    Filed: March 31, 2014
    Publication date: October 16, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jong-Cheon SUN, Hyung-Seop KIM, Hee-Won SUNWOO, Byoung-Ho LEE, Dong-Chul IHM, Soo-Bok CHIN