Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include: information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device. The overlay measurement device includes: a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, a detector that acquires an image of the first overlay mark and an image of the second overlay mark, a transceiver, and a processor electrically connected to the transceiver.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: A non-transitory computer-readable storage medium that records a data computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: A non-transitory computer-readable storage medium that records a data computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include: information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device. The overlay measurement device includes: a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, a detector that acquires an image of the first overlay mark and an image of the second overlay mark, a transceiver, and a processor electrically connected to the transceiver.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an objective lens that concentrates a beam from the light source on a measurement position of the wafer, and gathers the beam being reflected in the measurement positon; a lens focus actuator that adjusts a distance between the objective lens and the wafer such that a focus surface is placed at the first overlay mark or the second overlay mark; an auto focus module that adjusts a focus by adjusting the lens focus actuator; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.

Abstract: There are provided a computer-readable storage medium and an overlay measurement device therefor that records a data structure for storing data controlling an operation of an overlay measurement device. In a computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device in one embodiment, the data includes information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: A method of centering a correlation-based overlay includes resizing an overlay target image to a size smaller than an entire image size, defining first and second templates that are symmetrical to each other based on a diagonal in the resized image, and calculating a rough center coordinate by calculating a first correlation value representing a similarity symmetrical with respect to the diagonal between images of the first and second templates; defining first and second templates symmetrical based on a diagonal passing through the rough center coordinates in an original image of the overlay target image, calculating a fine center coordinate of the overlay target image by calculating a second correlation value representing a similarity symmetrical with respect to the diagonal between the images of the first and second templates; and centering an overlay key by moving a stage to a target position based on the fine center coordinates.

Abstract: An artificial intelligence system and a method for searching for an optimal model are provided. A method for searching for a learning mode of an artificial intelligence system includes receiving, by an operator included in a first node, first channels, deriving, by the operator included in the first node, first parameter weight indexes corresponding to weights of first parameters by calculating the first parameters corresponding to each of the received first channels with the received first channels, generating and outputting a second channel group by combining the first channel with the other channel, receiving, by an operator included in a second node, second channels included in the second channel group, and deriving, by the operator included in the second node, second parameter weight indexes corresponding to weights of second parameters by calculating the second parameters corresponding to the received second channels with the received second channels.

Abstract: An artificial intelligence system and a method for searching for an optimal model are provided. A method for searching for a learning mode of an artificial intelligence system includes receiving, by an operator included in a first node, first channels, deriving, by the operator included in the first node, first parameter weight indexes corresponding to weights of first parameters by calculating the first parameters corresponding to each of the received first channels with the received first channels, generating and outputting a second channel group by combining the first channel with the other channel, receiving, by an operator included in a second node, second channels included in the second channel group, and deriving, by the operator included in the second node, second parameter weight indexes corresponding to weights of second parameters by calculating the second parameters corresponding to the received second channels with the received second channels.

Abstract: An organic light emitting diode display device is disclosed. The organic light emitting diode display device includes an organic light emitting diode array formed on a flexible substrate, a cover film formed to cover the organic light emitting diode array, and a bottom film attached to a lower surface of the flexible substrate. Reliability of the organic light emitting diode display device may be improved by forming a cover film attached to the organic light emitting diode array and a bottom film attached to the lower surface of the flexible substrate on which the organic light emitting diode array is formed using the same material, and forming a moisture absorbent on the bottom film.

Abstract: Disclosed is an organic light emitting display (OLED) apparatus that includes a substrate; an organic light emitting element on the substrate, the organic light emitting element including a first electrode, an organic light emitting layer and a second electrode; a viscoelastic layer on the organic light emitting element, wherein an elastic portion of the viscoelastic layer is about 30% or more, the elastic portion being defined by <Equation 1>: Elastic portion (Ep) (%)=(?/?0)×100, wherein ?0 is an initial stress generated when a strain of about 50% is applied to the viscoelastic layer and ? is a final stress measured after the strain is continuously applied thereto for about 180 seconds, with the initial stress ?0 and the final stress ? being measured at about 80° C. through a relaxation modulus test.

Abstract: Disclosed is an organic light emitting display (OLED) apparatus that includes a substrate; an organic light emitting element on the substrate, the organic light emitting element including a first electrode, an organic light emitting layer and a second electrode; a viscoelastic layer on the organic light emitting element, wherein an elastic portion of the viscoelastic layer is about 30% or more, the elastic portion being defined by <Equation 1>: Elastic portion (Ep) (%)=(?/?0)×100, wherein ?0 is an initial stress generated when a strain of about 50% is applied to the viscoelastic layer and ? is a final stress measured after the strain is continuously applied thereto for about 180 seconds, with the initial stress ?0 and the final stress ? being measured at about 80° C. through a relaxation modulus test.

Abstract: An organic light emitting diode display device is disclosed. The organic light emitting diode display device includes an organic light emitting diode array formed on a flexible substrate, a cover film formed to cover the organic light emitting diode array, and a bottom film attached to a lower surface of the flexible substrate. Reliability of the organic light emitting diode display device may be improved by forming a cover film attached to the organic light emitting diode array and a bottom film attached to the lower surface of the flexible substrate on which the organic light emitting diode array is formed using the same material, and forming a moisture absorbent on the bottom film.

Abstract: An OLED device is discussed which includes: a drive thin film transistor formed on a substrate; an organic light emitting diode configured with first electrode, a light emission layer and a second electrode which are sequentially formed on the substrate provided with the drive thin film transistor; a barrier film disposed on the substrate with the organic light emitting element and configure to include a retardation film, an optically isotropic film and a thin layer interposed between the retardation film and the optically isotropic film; and a polarizing plate disposed on the barrier film and configured to prevent reflection of external light.