Abstract: An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an objective lens that concentrates a beam from the light source on a measurement position of the wafer, and gathers the beam being reflected in the measurement positon; a lens focus actuator that adjusts a distance between the objective lens and the wafer such that a focus surface is placed at the first overlay mark or the second overlay mark; an auto focus module that adjusts a focus by adjusting the lens focus actuator; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include: information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device. The overlay measurement device includes: a light source, an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark, a detector that acquires an image of the first overlay mark and an image of the second overlay mark, a transceiver, and a processor electrically connected to the transceiver.

Abstract: A non-transitory computer-readable storage medium that records a data computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: An overlay measurement device for measuring an error between a first overlay mark and a second overlay mark respectively formed on different layers of a wafer, includes: a light source; an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark; a detector for obtaining an image of the first overlay mark or an image of the second overlay mark; a transmission and receipt part; and a processor connecting to the transmission and receipt part electrically.

Abstract: An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.

Abstract: There are provided a computer-readable storage medium and an overlay measurement device therefor that records a data structure for storing data controlling an operation of an overlay measurement device. In a computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device in one embodiment, the data includes information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.

Abstract: A prelithiated negative electrode, and a secondary battery including a prelithiated electrode, including a negative electrode current collector; and a negative electrode active material layer present on at least one surface of the negative electrode current collector. The negative electrode active material layer includes high-capacity artificial graphite having no carbon coating. The negative electrode active material layer is prelithiated, and the content of lithium intercalated to the prelithiated negative electrode active material layer is 3% to 5% based on the lithium content intercalated when the negative electrode is charged to 100%.

Abstract: The present invention relates to a process of preparing hydroxyalkyl cellulose derivatives having improved enzymatic resistance. In particular, the present invention relates to a process of preparing hydroxyalkyl cellulose derivatives by reacting cellulose and ethylene oxide in the presence of alkali metal hydroxide, wherein the reaction between cellulose and ethylene oxide is performed in the presence of isopropyl alcohol azeotropic solvent in a horizontally agitated reactor, wherein the ethylene oxide is supplied via two steps, thus resulting in a two-step reaction, and the amount of alkali metal hydroxide remaining after the first reaction is controlled, thereby enabling to provide hydroxyalkyl cellulose derivatives having improved enzymatic resistance and turbidity and to remarkably decrease the solvent usage to have economical and environmental advantages.

Abstract: The present invention relates to a process of preparing hydroxyalkyl cellulose derivatives having improved enzymatic resistance. In particular, the present invention relates to a process of preparing hydroxyalkyl cellulose derivatives by reacting cellulose and ethylene oxide in the presence of alkali metal hydroxide, wherein the reaction between cellulose and ethylene oxide is performed in the presence of isopropyl alcohol azeotropic solvent in a horizontally agitated reactor, wherein the ethylene oxide is supplied via two steps, thus resulting in a two-step reaction, and the amount of alkali metal hydroxide remaining after the first reaction is controlled, thereby enabling to provide hydroxyalkyl cellulose derivatives having improved enzymatic resistance and turbidity and to remarkably decrease the solvent usage to have economical and environmental advantages.

Abstract: The present invention relates to a method for preparing hydroxyalkylalkylcellulose with high yield, more particularly to a method for preparing hydroxyalkylalkylcellulose with high yield, with at least 60% of alkoxy and hydroxyalkoxy substituted, by treating finely ground pulp with an alkali metal hydroxide at room temperature, reacting it with an alkylene oxide and an alkyl halide, and then adding an alkali metal hydroxide and an alkyl halide thereto. The method of the present invention is highly economical and also environment-friendly because waste of the reactants can be greatly reduced.