Patents by Inventor HEIDI M. MEYER
HEIDI M. MEYER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240038578Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An insulating structure is directly adjacent sidewalls of the lower fin portion of the fin. A first gate electrode is over the upper fin portion and over a first portion of the insulating structure. A second gate electrode is over the upper fin portion and over a second portion of the insulating structure. A first dielectric spacer is along a sidewall of the first gate electrode. A second dielectric spacer is along a sidewall of the second gate electrode, the second dielectric spacer continuous with the first dielectric spacer over a third portion of the insulating structure between the first gate electrode and the second gate electrode.Type: ApplicationFiled: October 4, 2023Publication date: February 1, 2024Inventors: Heidi M. MEYER, Ahmet TURA, Byron HO, Subhash JOSHI, Michael L. HATTENDORF, Christopher P. AUTH
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Patent number: 11881520Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a first plurality of semiconductor fins having a longest dimension along a first direction. Adjacent individual semiconductor fins of the first plurality of semiconductor fins are spaced apart from one another by a first amount in a second direction orthogonal to the first direction. A second plurality of semiconductor fins has a longest dimension along the first direction. Adjacent individual semiconductor fins of the second plurality of semiconductor fins are spaced apart from one another by the first amount in the second direction, and closest semiconductor fins of the first plurality of semiconductor fins and the second plurality of semiconductor fins are spaced apart by a second amount in the second direction.Type: GrantFiled: December 29, 2017Date of Patent: January 23, 2024Assignee: Intel CorporationInventors: Curtis Ward, Heidi M. Meyer, Michael L. Hattendorf, Christopher P. Auth
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Patent number: 11837456Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An insulating structure is directly adjacent sidewalls of the lower fin portion of the fin. A first gate electrode is over the upper fin portion and over a first portion of the insulating structure. A second gate electrode is over the upper fin portion and over a second portion of the insulating structure. A first dielectric spacer is along a sidewall of the first gate electrode. A second dielectric spacer is along a sidewall of the second gate electrode, the second dielectric spacer continuous with the first dielectric spacer over a third portion of the insulating structure between the first gate electrode and the second gate electrode.Type: GrantFiled: August 18, 2022Date of Patent: December 5, 2023Assignee: Intel CorporationInventors: Heidi M. Meyer, Ahmet Tura, Byron Ho, Subhash Joshi, Michael L. Hattendorf, Christopher P. Auth
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Publication number: 20230207664Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A first insulating layer is directly on sidewalls of the lower fin portion of the fin, wherein the first insulating layer is a non-doped insulating layer comprising silicon and oxygen. A second insulating layer is directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin, the second insulating layer comprising silicon and nitrogen. A dielectric fill material is directly laterally adjacent to the second insulating layer directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin.Type: ApplicationFiled: March 2, 2023Publication date: June 29, 2023Inventors: Michael L. HATTENDORF, Curtis WARD, Heidi M. MEYER, Tahir GHANI, Christopher P. AUTH
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Patent number: 11640985Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A first insulating layer is directly on sidewalls of the lower fin portion of the fin, wherein the first insulating layer is a non-doped insulating layer comprising silicon and oxygen. A second insulating layer is directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin, the second insulating layer comprising silicon and nitrogen. A dielectric fill material is directly laterally adjacent to the second insulating layer directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin.Type: GrantFiled: January 15, 2021Date of Patent: May 2, 2023Assignee: Intel CorporationInventors: Michael L. Hattendorf, Curtis Ward, Heidi M. Meyer, Tahir Ghani, Christopher P. Auth
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Publication number: 20230126174Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a first plurality of semiconductor fins having a longest dimension along a first direction. Adjacent individual semiconductor fins of the first plurality of semiconductor fins are spaced apart from one another by a first amount in a second direction orthogonal to the first direction. A second plurality of semiconductor fins has a longest dimension along the first direction. Adjacent individual semiconductor fins of the second plurality of semiconductor fins are spaced apart from one another by the first amount in the second direction, and closest semiconductor fins of the first plurality of semiconductor fins and the second plurality of semiconductor fins are spaced apart by a second amount in the second direction.Type: ApplicationFiled: December 23, 2022Publication date: April 27, 2023Inventors: Curtis WARD, Heidi M. MEYER, Michael L. HATTENDORF, Christopher P. AUTH
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Publication number: 20220406650Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An insulating structure is directly adjacent sidewalls of the lower fin portion of the fin. A first gate electrode is over the upper fin portion and over a first portion of the insulating structure. A second gate electrode is over the upper fin portion and over a second portion of the insulating structure. A first dielectric spacer is along a sidewall of the first gate electrode. A second dielectric spacer is along a sidewall of the second gate electrode, the second dielectric spacer continuous with the first dielectric spacer over a third portion of the insulating structure between the first gate electrode and the second gate electrode.Type: ApplicationFiled: August 18, 2022Publication date: December 22, 2022Inventors: Heidi M. MEYER, Ahmet TURA, Byron HO, Subhash JOSHI, Michael L. HATTENDORF, Christopher P. AUTH
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Patent number: 11462436Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An insulating structure is directly adjacent sidewalls of the lower fin portion of the fin. A first gate electrode is over the upper fin portion and over a first portion of the insulating structure. A second gate electrode is over the upper fin portion and over a second portion of the insulating structure. A first dielectric spacer is along a sidewall of the first gate electrode. A second dielectric spacer is along a sidewall of the second gate electrode, the second dielectric spacer continuous with the first dielectric spacer over a third portion of the insulating structure between the first gate electrode and the second gate electrode.Type: GrantFiled: December 29, 2017Date of Patent: October 4, 2022Assignee: Intel CorporationInventors: Heidi M. Meyer, Ahmet Tura, Byron Ho, Subhash Joshi, Michael L. Hattendorf, Christopher P. Auth
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Publication number: 20210143051Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A first insulating layer is directly on sidewalls of the lower fin portion of the fin, wherein the first insulating layer is a non-doped insulating layer comprising silicon and oxygen. A second insulating layer is directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin, the second insulating layer comprising silicon and nitrogen. A dielectric fill material is directly laterally adjacent to the second insulating layer directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin.Type: ApplicationFiled: January 15, 2021Publication date: May 13, 2021Inventors: Michael L. HATTENDORF, Curtis WARD, Heidi M. MEYER, Tahir GHANI, Christopher P. AUTH
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Patent number: 10930753Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A first insulating layer is directly on sidewalls of the lower fin portion of the fin, wherein the first insulating layer is a non-doped insulating layer comprising silicon and oxygen. A second insulating layer is directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin, the second insulating layer comprising silicon and nitrogen. A dielectric fill material is directly laterally adjacent to the second insulating layer directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin.Type: GrantFiled: December 29, 2017Date of Patent: February 23, 2021Assignee: Intel CorporationInventors: Michael L. Hattendorf, Curtis Ward, Heidi M. Meyer, Tahir Ghani, Christopher P. Auth
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Patent number: 10879241Abstract: Techniques are disclosed for controlling transistor sub-fin leakage. The techniques can be used for highly scaled finFETs, as well as other non-planar transistors. In some cases, the techniques include exposing a middle portion of a fin structure formed on a substrate and then converting the exposed portion to an electrically isolating material via a doping or oxidation process. For example, a monolayer doping (MLD) process may be used to deliver dopants to the exposed portion of the fin in a self-saturated monolayer scheme. In another example case, thermal oxidation may be used to convert the exposed portion to an insulator material. In some cases, a barrier layer (e.g., including carbon doping) may be located above the exposed portion of the fin to help prevent the doping or oxidation process from affecting the upper region of the fin, which is used for the transistor channel.Type: GrantFiled: September 25, 2015Date of Patent: December 29, 2020Assignee: INTEL CorporationInventors: Glenn A. Glass, Prashant Majhi, Anand S. Murthy, Tahir Ghani, Daniel B. Aubertine, Heidi M. Meyer, Karthik Jambunathan, Gopinath Bhimarasetti
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Publication number: 20200227413Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a first plurality of semiconductor fins having a longest dimension along a first direction. Adjacent individual semiconductor fins of the first plurality of semiconductor fins are spaced apart from one another by a first amount in a second direction orthogonal to the first direction. A second plurality of semiconductor fins has a longest dimension along the first direction.Type: ApplicationFiled: December 29, 2017Publication date: July 16, 2020Inventors: Curtis WARD, Heidi M. MEYER, Michael L. HATTENDORF, Christopher P. AUTH
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Publication number: 20190164808Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin comprising silicon, the fin having a lower fin portion and an upper fin portion. A first insulating layer is directly on sidewalls of the lower fin portion of the fin, wherein the first insulating layer is a non-doped insulating layer comprising silicon and oxygen. A second insulating layer is directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin, the second insulating layer comprising silicon and nitrogen. A dielectric fill material is directly laterally adjacent to the second insulating layer directly on the first insulating layer directly on the sidewalls of the lower fin portion of the fin.Type: ApplicationFiled: December 29, 2017Publication date: May 30, 2019Inventors: Michael L. HATTENDORF, Curtis WARD, Heidi M. MEYER, Tahir GHANI, Christopher P. AUTH
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Publication number: 20190164809Abstract: Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An insulating structure is directly adjacent sidewalls of the lower fin portion of the fin. A first gate electrode is over the upper fin portion and over a first portion of the insulating structure. A second gate electrode is over the upper fin portion and over a second portion of the insulating structure. A first dielectric spacer is along a sidewall of the first gate electrode. A second dielectric spacer is along a sidewall of the second gate electrode, the second dielectric spacer continuous with the first dielectric spacer over a third portion of the insulating structure between the first gate electrode and the second gate electrode.Type: ApplicationFiled: December 29, 2017Publication date: May 30, 2019Inventors: Heidi M. MEYER, Ahmet TURA, Byron HO, Subhash JOSHI, Michael L. HATTENDORF, Christopher P. AUTH
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Publication number: 20180247939Abstract: Techniques are disclosed for controlling transistor sub-fin leakage. The techniques can be used for highly scaled finFETs, as well as other non-planar transistors. In some cases, the techniques include exposing a middle portion of a fin structure formed on a substrate and then converting the exposed portion to an electrically isolating material via a doping or oxidation process. For example, a monolayer doping (MLD) process may be used to deliver dopants to the exposed portion of the fin in a self-saturated monolayer scheme. In another example case, thermal oxidation may be used to convert the exposed portion to an insulator material. In some cases, a barrier layer (e.g., including carbon doping) may be located above the exposed portion of the fin to help prevent the doping or oxidation process from affecting the upper region of the fin, which is used for the transistor channel.Type: ApplicationFiled: September 25, 2015Publication date: August 30, 2018Applicant: INTEL CORPORATIONInventors: GLENN A. GLASS, PRASHANT MAJHI, ANAND S. MURTHY, TAHIR GHANI, DANIEL B. AUBERTINE, HEIDI M. MEYER, KARTHIK JAMBUNATHAN, GOPINATH BHIMARASETTI