Patents by Inventor Heike Landgraf
Heike Landgraf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20200299842Abstract: An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.Type: ApplicationFiled: June 5, 2020Publication date: September 24, 2020Inventors: Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Neil MORRISON
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Patent number: 10689760Abstract: An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.Type: GrantFiled: November 14, 2016Date of Patent: June 23, 2020Assignee: Applied Materials, Inc.Inventors: Jose Manuel Dieguez-Campo, Heike Landgraf, Tobias Stolley, Stefan Hein, Florian Ries, Morrison Neil
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Publication number: 20190112706Abstract: An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.Type: ApplicationFiled: December 11, 2018Publication date: April 18, 2019Inventors: Hans-Georg LOTZ, Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
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Publication number: 20180100236Abstract: An apparatus for depositing a thin film on a substrate is described. The apparatus includes a substrate support having an outer surface for guiding the substrate along a surface of the substrate support through a first vacuum processing region and at least one second vacuum processing region, a first deposition sources corresponding to the first processing region and at least one second deposition source corresponding to the at least one second vacuum processing region. The apparatus further includes one or more vacuum flanges providing at least a further gas outlet between the first deposition source and the at least one second deposition source.Type: ApplicationFiled: December 11, 2017Publication date: April 12, 2018Inventors: Neil Morrison, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
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Patent number: 9873945Abstract: An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode.Type: GrantFiled: April 26, 2013Date of Patent: January 23, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Neil Morrison, Jose Manuel Dieguez-Campo, Heike Landgraf, Tobias Stolley, Stefan Hein, Florian Ries, Wolfgang Buschbeck
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Publication number: 20170058404Abstract: An apparatus for processing a flexible substrate is described.Type: ApplicationFiled: November 14, 2016Publication date: March 2, 2017Inventors: Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Morrison NEIL
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Patent number: 9348237Abstract: Mask carriers and mask alignment in vacuum deposition processes, mask handling modules, and methods for aligning a mask. A mask handling module can include a substrate carrier for carrying at least one substrate; a mask carrier for carrying at least two masks. The mask carrier can include at least two mask carrier sections each being adapted to carry a mask and a mask carrier positioning device for moving the mask carrier relative to the substrate carrier. The mask carrier sections are arranged so that the masks carried on the mask carrier sections can be positioned on the mask carrier in respective planes forming an angle with respect to each other so that only one of the at least two masks can be aligned to one of the at least one substrates.Type: GrantFiled: August 20, 2010Date of Patent: May 24, 2016Assignee: Applied Materials, Inc.Inventors: Michael Heumüller, Heike Landgraf, Michael König
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Publication number: 20140290861Abstract: An apparatus for processing a flexible substrate is described. The apparatus includes a vacuum chamber having a first chamber portion, a second chamber portion and a third chamber portion, an unwinding shaft, a coating drum having a rotation axis and a curved outer surface for guiding the substrate along the curved outer surface through a first vacuum processing region and at least one second vacuum processing region, wherein a first portion of the coating drum is provided in the second chamber portion and the remaining portion of the coating drum is provided in the third chamber portion, a first processing station corresponding to the first processing region and at least one second processing station corresponding to the at least one second vacuum processing region, wherein the first processing station and the second processing station each includes a flange portion.Type: ApplicationFiled: May 14, 2013Publication date: October 2, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Morrison NEIL
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Publication number: 20140208565Abstract: An apparatus for coating a thin film on a flexible substrate is described. The apparatus includes a coating drum having an outer surface for guiding the flexible substrate through a first vacuum processing region and at least one second vacuum processing region, a gas separation unit for separating the first vacuum processing region and at least one second vacuum processing region and adapted to form a slit through which the flexible substrate can pass between the outer surface of the coating drum and the gas separation unit, wherein the gas separation unit is adapted to control fluid communication between the first processing region and the second processing region by adjusting the position of the gas separation unit.Type: ApplicationFiled: April 26, 2013Publication date: July 31, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Hans-Georg LOTZ, Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
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Publication number: 20140212600Abstract: An apparatus includes a substrate support having an outer surface for guiding the substrate through a first vacuum processing region and at least one second vacuum processing region. First and second deposition sources correspond to the first processing region and at least one second deposition source corresponds to the at least one second vacuum processing region, wherein at least the first deposition source includes an electrode having a surface that opposes the substrate support. A processing gas inlet and a processing gas outlet are arranged at opposing sides of the surface of the electrode. At least one separation gas inlet how one or more openings, wherein the one or more openings are at least provided at one of opposing sides of the electrode surface such that the processing gas inlet and/or the processing gas outlet are provided between the one or more openings and the surface of the electrode.Type: ApplicationFiled: April 26, 2013Publication date: July 31, 2014Applicant: APPLIED MATERIALS, INC.Inventors: Morrison NEIL, Jose Manuel DIEGUEZ-CAMPO, Heike LANDGRAF, Tobias STOLLEY, Stefan HEIN, Florian RIES, Wolfgang BUSCHBECK
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Patent number: 8733277Abstract: A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.Type: GrantFiled: December 1, 2008Date of Patent: May 27, 2014Assignee: Applied Materials, Inc.Inventors: Heike Landgraf, Uwe Schussler, Stefan Bangert
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Patent number: 8686819Abstract: A magnetic holding device is adapted for holding a mask during processing of a substrate. The magnetic holding device includes a substrate carrier which is adapted for receiving the substrate to be processed. The substrate carrier includes a permanent magnet adapted for generating a first magnetic field for holding the mask. Furthermore, the substrate carrier includes a solenoid which is adapted for generating a second magnetic field adapted for at least partially compensating the first magnetic field. In case the first magnetic field is compensated, at least partially, by means of the second magnetic field, the mask is released from the substrate carrier.Type: GrantFiled: June 18, 2010Date of Patent: April 1, 2014Assignee: Applied Materials, Inc.Inventors: Uwe Schuessler, Stefan Bangert, Heike Landgraf
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Publication number: 20120037819Abstract: Mask carriers and mask alignment in vacuum deposition processes, mask handling modules, and methods for aligning a mask. A mask handling module can include a substrate carrier for carrying at least one substrate; a mask carrier for carrying at least two masks. The mask carrier can include at least two mask carrier sections each being adapted to carry a mask and a mask carrier positioning device for moving the mask carrier relative to the substrate carrier. The mask carrier sections are arranged so that the masks carried on the mask carrier sections can be positioned on the mask carrier in respective planes forming an angle with respect to each other so that only one of the at least two masks can be aligned to one of the at least one substrates.Type: ApplicationFiled: August 20, 2010Publication date: February 16, 2012Inventors: Michael Heumüller, Heike Landgraf, Michael König
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Publication number: 20110304418Abstract: A magnetic holding device is adapted for holding a mask during processing of a substrate. The magnetic holding device includes a substrate carrier which is adapted for receiving the substrate to be processed. The substrate carrier includes a permanent magnet adapted for generating a first magnetic field for holding the mask. Furthermore, the substrate carrier includes a solenoid which is adapted for generating a second magnetic field adapted for at least partially compensating the first magnetic field. In case the first magnetic field is compensated, at least partially, by means of the second magnetic field, the mask is released from the substrate carrier.Type: ApplicationFiled: June 18, 2010Publication date: December 15, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Uwe SCHUESSLER, Stefan BANGERT, Heike LANDGRAF
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Publication number: 20110306216Abstract: A holding device adapted for holding a mask and a substrate during processing of the substrate is provided. The holding device includes a mask frame adapted for supporting the mask and a substrate carrier adapted for carrying the substrate to be processed. The substrate carrier has at least one recess adapted for receiving the mask frame which holds the mask.Type: ApplicationFiled: June 17, 2010Publication date: December 15, 2011Applicant: APPLIED MATERIALS, INC.Inventors: Uwe SCHUESSLER, Stefan BANGERT, Heike LANDGRAF
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Publication number: 20110185561Abstract: A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.Type: ApplicationFiled: December 1, 2008Publication date: August 4, 2011Inventors: Heike Landgraf, Uwe Schüssler, Stefan Bangert
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Publication number: 20100092658Abstract: The present invention refers to a coating installation and a corresponding method or coating a substrate comprising the steps of: providing a substrate having at least one surface to be coated; depositing a patterned mask layer on the at least one surface of the substrate by using a printing method, the patterned mask layer comprising one or more balls; depositing at least one layer of coating material on the surface of the substrate having the patterned mask layer deposited thereon, depositing of the at least one layer being performed by at least one of the group comprising a vacuum deposition method, a sputtering method, an evaporation method, a plasma coating method, a CVD method, and a PVD method.Type: ApplicationFiled: October 14, 2008Publication date: April 15, 2010Applicant: Applied Materials, Inc.Inventors: Jose Manuel Dieguez-Campo, John M. White, Heike Landgraf
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Publication number: 20090260566Abstract: A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.Type: ApplicationFiled: October 2, 2008Publication date: October 22, 2009Applicant: Applied Materials, Inc.Inventors: Heike Landgraf, Uwe Schuessler, Stefan Bangert