Abstract: This disclosure describes a capacitively controlled Fabry-Perot interferometer which comprises a first mirror layer with a first metallic thin-film layer embedded in a first insulating layer and a second mirror layer with a second metallic thin-film layer embedded within a second insulating layer. A control region in the first metallic thin-film layer is at least partly aligned in an actuation direction with a control region in the second metallic thin-film layer. The interferometer also comprises a first control electrode and a first dielectric layer, and the first dielectric layer lies between the first control electrode and at least a part of the control region of the first metallic thin-film layer.

Abstract: A spectral imaging device comprises: an optical modifier system (SYS1) to form axial light beams (LB2) from received light beams (LB1), the axial light beams (LB2) being parallel with an optical axis (AX1) of the imaging device (500), a Fabry-Perot interferometer (FPI) to provide filtered axial light beams (LB3) by filtering light of the axial light beams (LB2), an image sensor (SEN1), and an array (ARR1) of lenses (LNS0,0, LNS0,1) to form a plurality of sub-images (S0,0, S0,1) on the image sensor (SEN1) by focusing light of the filtered light beams (LB3).

Abstract: This disclosure describes a capacitively controlled Fabry-Perot interferometer which comprises a first mirror layer with a first metallic thin-film layer embedded in a first insulating layer and a second mirror layer with a second metallic thin-film layer embedded within a second insulating layer. A control region in the first metallic thin-film layer is at least partly aligned in an actuation direction with a control region in the second metallic thin-film layer. The interferometer also comprises a first control electrode and a first dielectric layer, and the first dielectric layer lies between the first control electrode and at least a part of the control region of the first metallic thin-film layer.

Abstract: A microelectromechanical (MEMS) Fabry-Perot interferometer includes a transparent substrate; a first metallic mirror structure on the transparent substrate, including a first metal layer and a first support layer; a second metallic mirror structure above the first metallic mirror structure on an opposite side of the first metallic mirror structure in view of the transparent substrate, the second metallic mirror structure including a second metal layer and a second support layer, wherein the first and the second support layer are parallel and including at least one of aluminum oxide or titanium dioxide; a Fabry-Perot cavity between the first and the second support layer, whereby the Fabry-Perot cavity is formed by providing an insulation layer on the first mirror structure, and at least partially removing the insulation layer after providing the second mirror structure; and electrodes for providing electrical contacts to the first and the second metal layer.

Abstract: A microelectromechanical (MEMS) Fabry-Perot interferometer includes a transparent substrate; a first metallic mirror structure on the transparent substrate, including a first metal layer and a first support layer; a second metallic mirror structure above the first metallic mirror structure on an opposite side of the first metallic mirror structure in view of the transparent substrate, the second metallic mirror structure including a second metal layer and a second support layer, wherein the first and the second support layer are parallel and including at least one of aluminum oxide or titanium dioxide; a Fabry-Perot cavity between the first and the second support layer, whereby the Fabry-Perot cavity is formed by providing an insulation layer on the first mirror structure, and at least partially removing the insulation layer after providing the second mirror structure; and electrodes for providing electrical contacts to the first and the second metal layer.

Abstract: An arrangement for hyperspectral imaging, comprising an imaging sensor (170,270); a band-pass filter element (130,230): at least one imaging optics element (120,160,220,260) configured to form an image on the imaging sensor (170,270); and a first adjustable multi passband filter (150a,255); wherein the first (150a,255) adjustable multi passband filter is configured to be adjusted by tilting.

Abstract: An arrangement for hyperspectral imaging, comprising an imaging sensor (170,270); a band-pass filter element (130,230): at least one imaging optics element (120,160,220,260) configured to form an image on the imaging sensor (170,270); and a first adjustable multi passband filter (150a,255); wherein the first (150a,255) adjustable multi passband filter is configured to be adjusted by tilting.

Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometeror a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometersis controlled into different modes during the measurement of a single target. The invention can be applied inoptical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement radiation beam received from the target or through it is detected. The measurement system has optical fibers for guiding radiation from/to target positions. Radiation of several target positions is simultaneously filtered by a Fabry-Perot interferometer and detected by a row detector, for example.

Abstract: The invention relates to a Fabry-Perot interferometer and a method for producing the same. More specifically, the invention relates to Fabry-Perot interferometers which are controllable with one or several actuators, such as piezoelectric, electrostrictive or flexoelectric actuators. In prior art technology there is a problem to achieve a sufficiently small and uniform gap between mirrors. In the present invention an intermediate structure (85a, 85b, 95a, 95b, 81a, 81b, 91a, 91b, 98a, 98b) is used between a mirror and an actuator or between two mirrors. The method of production also includes measuring the width distribution of the gap in several phases, and providing pre-actuation of actuators.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the pass band of the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Abstract: An imaging spectrometer includes a Fabry-Perot interferometer and an image sensor having color-sensitive pixels. The interferometer has a first transmission peak and a second transmission peak (PEAK2). A method calibrating the spectrometer includes providing first calibration light, which has a narrow spectral peak, obtaining first detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a first spectral position, obtaining second detector signal values from the image sensor by coupling the first calibration light into the spectrometer when the reference spectral peak is near a second spectral position, providing second calibration light, which has a broad bandwidth, and obtaining third detector signal values from the image sensor by coupling the second calibration light into the spectrometer.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement radiation beam received from the target or through it is detected. The measurement system has optical fibres for guiding radiation from/to target positions. Radiation of several target positions is simultaneously filtered by a Fabry-Perot interferometer and detected by a row detector, for example.

Abstract: The invention relates to a spectrometer for material analysis and to a control method for a spectrometer. The spectrometer includes a radiant source (140) formed by multiple single radiation sources (141) having different central wavelengths, for generating a measuring signal, a measurement object (100) containing a material to be analyzed, at least one electrically tunable Fabry-Perot filter (120, 220) for the band pass filtering the measuring signal by at least two pass bands, and a detector (300, 400) for detecting said filtered measuring signals received from the measurement object (100). The spectrometer has: means (312) for modulating each of the single radiation sources (141) and correspondingly means (307, 309) for demodulating the detected signals such that the signal from each single radiation source can be distinguished from each other in the detector (300, 400); and means for detecting (300, 400) and demodulating (306, 307) multiple pass hands simultaneously.

Abstract: The invention relates to a spectrometer, a spectrometric method and detector, and a new use of an interferometer. The spectrometer comprises a Fabry-Perot interferometer (120), to which light can be guided from the object (100) being investigated, in order to produce an interference image, and a detector (130) at which the interference image is aimed. The transmittance of the interferometer (120) is spectrally sliced to at least two separate wavelength bands. For its parts, the detector (130) is arranged to detect the interference image from at least two separate wavelength bands spatially. The detector is arranged to detect the said wavelength bands simultaneously, by exploiting the response of the image elements of the detector, calibrated as a function of the mirror gap of the interferometer, in order to detect simultaneously at least two different orders of the interference.

Abstract: The invention relates to a system and a method for optical measurement of a target, wherein the target is illuminated, either actively illuminated, reflecting ambient light, or self illuminating, and a measurement light beam received from the target or through it is detected. The prior art optical measurement systems generally include mechanical filter wheels and photomultiplier tubes, which cause the equipment to be expensive, large-sized and often not sufficiently accurate and stable. The objective of the invention is achieved with a solution, in which the illuminating light beam and/or measurement light beam is led through a Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers, and the Fabry-Perot interferometer or a set of two or more Fabry-Perot Interferometers is controlled into different modes during the measurement of a single target. The invention can be applied in optical measurements where, for example, reflectance, absorption of fluorescence of the target is measured.

Abstract: The invention relates to a spectrometer, a spectrometric method and detector, and a new use of an interferometer. The spectrometer comprises a Fabry-Perot interferometer (120), to which light can be guided from the object (100) being investigated, in order to produce an interference image, and a detector (130) at which the interference image is aimed. The transmittance of the interferometer (120) is spectrally sliced to at least two separate wavelength bands. For its parts, the detector (130) is arranged to detect the interference image from at least two separate wavelength bands spatially. The detector is arranged to detect the said wavelength bands simultaneously, by exploiting the response of the image elements of the detector, calibrated as a function of the mirror gap of the interferometer, in order to detect simultaneously at least two different orders of the interference.