Patents by Inventor Heiko Brunner

Heiko Brunner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230313401
    Abstract: The invention relates to aqueous acidic plating baths for electrodeposition of copper and copper alloys in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises copper ions, at least one acid and an ureylene polymer. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Application
    Filed: June 29, 2021
    Publication date: October 5, 2023
    Inventors: Heiko BRUNNER, Sandra HEYDE, Peter HAACK, Angela LLAVONA-SERRANO
  • Publication number: 20230220558
    Abstract: An aqueous etching composition comprising: (a) functionalized urea, biuret and guanidine derivatives and/or salts thereof selected from compounds having formulae I or II: wherein X and Y are independently selected from oxygen, NRR? and NR5, R, R? and R5 are independently selected from R1, hydrogen, polyethylene glycols, aromatic compounds, and C1-C4 alkyl, wherein the aromatic compounds and C1-C4 alkyl optionally comprise at least one substituent selected as OR6, R6 is selected from hydrogen and C1-C4alkyl, X and Y can be identical or different; R1 and R2 are independently selected from hydrogen, alkyl compounds, amines, and nitrogen-comprising heteroaromatic compounds, R1 and R2 can be identical or different, with the proviso that R1 cannot be hydrogen, and with the proviso that in compounds having formula I R1 cannot be hydrogen or alkyl compound if X is oxygen; m is an integer from 1 to 4, and n is an integer from 0 to 8; wherein m and n can be identical or different; (b) an oxidizing agent; and
    Type: Application
    Filed: June 10, 2021
    Publication date: July 13, 2023
    Inventors: Lars KOHLMANN, Heiko BRUNNER
  • Patent number: 11512405
    Abstract: The present invention concerns a metal or metal alloy deposition composition, particularly a copper or copper alloy deposition composition, for electrolytic deposition of a metal or metal alloy layer, particularly for electrolytic deposition of a copper or copper alloy layer, comprising at least one type of metal ions to be deposited, preferably copper ions, and at least one imidazole based plating compound. The present invention further concerns a method for preparation of the plating compound, the plating compound itself and its use in a metal or metal alloy deposition composition. The inventive metal or metal alloy deposition composition can be preferably used for filling recessed structures, in particular those having higher diameter to depth aspect ratios.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: November 29, 2022
    Assignee: Atotech Deutschland GmbH
    Inventors: Angela Llavona-Serrano, Timo Bangerter, Olivier Mann, Pamela Cebulla, Stefanie Ackermann, Heiko Brunner, Kinga Haubner, Bernd Froese
  • Publication number: 20220249388
    Abstract: The invention relates to nanoparticles comprising Enzalutamide, processes for the preparation of such nanoparticles, pharmaceutical compositions and pharmaceutical dosage forms comprising such nanoparticles, processes for the preparation of such pharmaceutical dosage forms, and uses of the pharmaceutical dosage forms for medical purposes.
    Type: Application
    Filed: May 22, 2020
    Publication date: August 11, 2022
    Applicant: HELM AG
    Inventors: Heiko BRUNNER, Frank GINDULLIS
  • Patent number: 11091849
    Abstract: An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R1 is a substituted or unsubstituted alkenyl group, R2 may be present or not, and if present R2 is a —(CH2)n—SO3? group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
    Type: Grant
    Filed: September 13, 2018
    Date of Patent: August 17, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Josef Gaida, Jan Sperling, Mauro Castellani, Grigory Vazhenin, Stefanie Ackermann, Heiko Brunner, Dirk Rohde
  • Patent number: 11066553
    Abstract: The present invention relates to imidazoyl urea polymers and their use in aqueous acidic plating baths for metal or metal alloy deposition such as electrolytic deposition of copper or alloys thereof in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of metal ions and an imidazoyl urea polymer. The plating bath is particularly useful for filling recessed structures and build-up of pillar bump structures.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: July 20, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Lars Kohlmann, Agnieszka Witczak, Olivier Mann
  • Patent number: 10882842
    Abstract: The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths. The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.
    Type: Grant
    Filed: January 26, 2018
    Date of Patent: January 5, 2021
    Assignee: Atotech Deutschland GmbH
    Inventors: Rangarajan Jagannathan, James Adolf, Jun Wu, Lars Kohlmann, Heiko Brunner
  • Publication number: 20200340132
    Abstract: The present invention concerns a metal or metal alloy deposition composition, particularly a copper or copper alloy deposition composition, for electrolytic deposition of a metal or metal alloy layer, particularly for electrolytic deposition of a copper or copper alloy layer, comprising at least one type of metal ions to be deposited, preferably copper ions, and at least one imidazole based plating compound. The present invention further concerns a method for preparation of the plating compound, the plating compound itself and its use in a metal or metal alloy deposition composition. The inventive metal or metal alloy deposition composition can be preferably used for filling recessed structures, in particular those having higher diameter to depth aspect ratios.
    Type: Application
    Filed: December 14, 2018
    Publication date: October 29, 2020
    Inventors: Angela LLAVONA-SERRANO, Timo BANGERTER, Olivier MANN, Pamela CEBULLA, Stefanie ACKERMANN, Heiko BRUNNER, Kinga HAUBNER, Bernd FROESE
  • Patent number: 10767275
    Abstract: The present invention relates to bisurea derivatives and their use in aqueous plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions and a bisurea derivative. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Grant
    Filed: August 30, 2016
    Date of Patent: September 8, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Lars Kohlmann, Agnieszka Witczak, Olivier Mann
  • Publication number: 20200231565
    Abstract: The present invention concerns pyridinium compounds, a synthesis method for their preparation, metal or metal alloy plating baths containing said pyridinium compounds and a method for use of said metal or metal alloy plating baths. The plating baths are particularly suitable for use in filling of recessed structures in the electronics and semiconductor industry including dual damascene applications.
    Type: Application
    Filed: January 26, 2018
    Publication date: July 23, 2020
    Inventors: Rangarajan JAGANNATHAN, James ADOLF, Jun WU, Lars KOHLMANN, Heiko BRUNNER
  • Publication number: 20200199766
    Abstract: An aqueous bath for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy, the bath comprising a source of nickel ions, and optionally a source of ions of at least one alloying metal, at least one buffering agent, at least one of a dimer of a compound of formula (I) or mixtures thereof wherein R1 is a substituted or unsubstituted alkenyl group, R2 may be present or not, and if present R2 is a —(CH2)n-SO3? group, wherein n is an integer in the range of 1-6, and wherein one or more of the hydrogens in the group may be replaced by a substituent, preferably hydroxide; and a method for filling a vertical interconnect access or trench of a work piece with nickel or a nickel alloy with said aqueous bath.
    Type: Application
    Filed: September 13, 2018
    Publication date: June 25, 2020
    Inventors: Josef GAIDA, Jan SPERLING, Mauro CASTELLANI, Grigory VAZHENIN, Stefanie ACKERMANN, Heiko BRUNNER, Dirk ROHDE
  • Patent number: 10538850
    Abstract: The present invention relates to aqueous acidic plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions, at least one acid and at least one guanidine compound. The plating bath is particularly useful for plating recessed structures with copper and build-up of copper pillar bump structures.
    Type: Grant
    Filed: April 20, 2016
    Date of Patent: January 21, 2020
    Assignee: Atotech Deutschland GmbH
    Inventors: Heiko Brunner, Dirk Rohde, Manuel Pölleth, Sven Rückbrod, Desthree Darwin, Sandra Niemann, Gerhard Steinberger
  • Patent number: 10513780
    Abstract: The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the invention comprises a source for palladium ions, a reducing agent for palladium ions and an unsaturated compound. The aqueous plating bath composition according to the invention has an improved stability against undesired decomposition due to the unsaturated compounds while keeping the deposition rate for palladium at the desired satisfying value. The aqueous plating bath composition has also a prolonged life time. The unsaturated compounds of the invention allow for adjusting the deposition rate to a satisfying range over the bath life time and for electrolessly depositing palladium layers at lower temperatures.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: December 24, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Andreas Walter, Christof Suchentrunk, Thomas Beck, Gerhard Steinberger, Holger Bera, Heiko Brunner, Bernd Froese
  • Publication number: 20190264328
    Abstract: The present invention relates to a method for providing a multilayer coating on a surface of a substrate comprising the following method steps (i) providing the substrate; (ii) depositing at least one metal oxide compound onto the surface of the substrate; (iii) heat-treating the surface of the substrate such that a metal oxide is formed thereon; (iv) treating the surface of the substrate with a treatment solution comprising at least one nitrogen containing polymeric treatment additive; (v) treating the surface of the substrate with an activation solution; and (vi) treating the surface of the substrate with a metallising solution such that a metal or metal alloy is deposited thereon. The invention further concerns the use of treatment additives as enhancer for the metal deposition.
    Type: Application
    Filed: September 15, 2017
    Publication date: August 29, 2019
    Inventors: Tobias BERNHARD, Anna PETER, Michael MERSCHKY, Frank BRÜNING, Taybet BILKAY-TRONI, Heiko BRUNNER
  • Publication number: 20190144667
    Abstract: The present invention relates to imidazoyl urea polymers and their use in aqueous acidic plating baths for metal or metal alloy deposition such as electrolytic deposition of copper or alloys thereof in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of metal ions and an imidazoyl urea polymer. The plating bath is particularly useful for filling recessed structures and build-up of pillar bump structures.
    Type: Application
    Filed: August 19, 2016
    Publication date: May 16, 2019
    Inventors: Heiko BRUNNER, Lars KOHLMANN, Agnieszka WITCZAK, Olivier MANN
  • Patent number: 10219391
    Abstract: A method for pretreating a copper surface for the subsequent formation of a firmly adhesive bond between the copper surface and a plastic material substrate. The method comprises bringing a copper surface into contact with: a) hydrogen peroxide; b) an acid; c) a nitrogen-containing, five-membered, heterocyclic compound; and d) a lactam, amide, or polyamide, connected at one or more of its nitrogen atoms with at least one residue of formula (I), wherein: n is an integer from 1 to 100; R1 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; R2 is hydrogen or a hydrocarbon residue with 1 to 6 carbon atoms; and each R1 and R2 in a —(CHR1—CHR2—O)— moiety is selected independently of each R1 and R2 in another —(CHR1—CHR2—O)— moiety.
    Type: Grant
    Filed: October 5, 2016
    Date of Patent: February 26, 2019
    Assignee: Atotech Deutschland GmbH
    Inventors: Christian Sparing, Thomas Huelsmann, Arno Clicque, Patrick Brooks, Adrian Zee, Heiko Brunner
  • Publication number: 20180340260
    Abstract: The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the invention comprises a source for palladium ions, a reducing agent for palladium ions and an unsaturated compound. The aqueous plating bath composition according to the invention has an improved stability against undesired decomposition due to the unsaturated compounds while keeping the deposition rate for palladium at the desired satisfying value. The aqueous plating bath composition has also a prolonged life time. The unsaturated compounds of the invention allow for adjusting the deposition rate to a satisfying range over the bath life time and for electrolessly depositing palladium layers at lower temperatures.
    Type: Application
    Filed: November 28, 2016
    Publication date: November 29, 2018
    Inventors: Andreas WALTER, Christof SUCHENTRUNK, Thomas BECK, Gerhard STEINBERGER, Holger BERA, Heiko BRUNNER, Bernd FROESE
  • Publication number: 20180340261
    Abstract: The invention relates to an aqueous plating bath composition and a method for depositing a palladium layer by electroless plating onto a substrate. The aqueous plating bath composition according to the invention comprises a source for palladium ions, a reducing agent for palladium ions and a cyanide group containing aromatic compound. The aqueous plating bath composition according to the invention has an improved stability against undesired decomposition due to the cyanide group containing aromatic compounds while keeping the deposition rate for palladium at the desired satisfying value. The aqueous plating bath composition has also a prolonged life time. The cyanide group containing aromatic compounds of the invention allow for adjusting the deposition rate to a satisfying range over the bath life time and for electrolessly depositing palladium layers at lower temperatures.
    Type: Application
    Filed: November 28, 2016
    Publication date: November 29, 2018
    Inventors: Andreas WALTER, Christof SUCHENTRUNK, Thomas BECK, Gerhard STEINBERGER, Holger BERA, Heiko BRUNNER, Sven RÜCKBROD
  • Publication number: 20180223442
    Abstract: The present invention relates to bisurea derivatives and their use in aqueous plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions and a bisurea derivative. The plating bath is particularly useful for filling recessed structures with copper and build-up of pillar bump structures.
    Type: Application
    Filed: August 30, 2016
    Publication date: August 9, 2018
    Inventors: Heiko BRUNNER, Lars KOHLMANN, Agnieszka WITCZAK, Olivier MANN
  • Publication number: 20180112320
    Abstract: The present invention relates to aqueous acidic plating baths for copper and copper alloy deposition in the manufacture of printed circuit boards, IC substrates, semiconducting and glass devices for electronic applications. The plating bath according to the present invention comprises at least one source of copper ions, at least one acid and at least one guanidine compound. The plating bath is particularly useful for plating recessed structures with copper and build-up of copper pillar bump structures.
    Type: Application
    Filed: April 20, 2016
    Publication date: April 26, 2018
    Applicant: Atotech Deutschland GmbH
    Inventors: Heiko BRUNNER, Dirk ROHDE, Manuel PÖLLETH, Sven RÜCKBROD, Desthree DARWIN, Sandra NIEMANN, Gerhard STEINBERGER