Abstract: A connection device serves for connecting a first tube end, which can be connected to a vacuum pump, to a second tube end which can be connected to a chamber to be evacuated. To this end, the connection element has a tube element for fluidically connecting the vacuum pump to the chamber to be evacuated. The tube element is connected on each side via a connection element to the respective tube end. At least one of the two connection elements is configured here in such a way that it is exclusively suitable for transmitting torques. Furthermore, a decoupling element is provided for mechanically decoupling the at least one connection element, which is exclusively suitable for transmitting torques, from the corresponding tube end.

Abstract: A device for storing kinetic energy, which has a flywheel in a housing. The flywheel is mounted in the housing via a shaft. A motor-generator unit is provided for storing energy as well as for energy recovery. In order to improve efficiency, a vacuum pump for evacuating the interior is arranged in the housing. The vacuum pump is disposed on the shaft.

Abstract: A connection device serves for connecting a first tube end, which can be connected to a vacuum pump, to a second tube end which can be connected to a chamber to be evacuated. To this end, the connection element has a tube element for fluidically connecting the vacuum pump to the chamber to be evacuated. The tube element is connected on each side via a connection element to the respective tube end. At least one of the two connection elements is configured here in such a way that it is exclusively suitable for transmitting torques. Furthermore, a decoupling element is provided for mechanically decoupling the at least one connection element, which is exclusively suitable for transmitting torques, from the corresponding tube end.

Abstract: A device for storing kinetic energy, which has a flywheel in a housing. The flywheel is mounted in the housing via a shaft. A motor-generator unit is provided for storing energy as well as for energy recovery. In order to improve efficiency, a vacuum pump for evacuating the interior is arranged in the housing. The vacuum pump is disposed on the shaft.

Abstract: A rotor disc for a vacuum pump, in particular a turbo molecular pump, having an inner ring. The inner ring is connected to a plurality of blade elements extending radially outward. The inner ring has at least one expansion joint. For assembly, the inner ring can be surrounded by a retaining ring and arranged on a hollow cylindrical carrier element as applicable.

Abstract: A rotor disc for a vacuum pump, in particular a turbo molecular pump, having an inner ring. The inner ring is connected to a plurality of blade elements extending radially outward. The inner ring has at least one expansion joint. For assembly, the inner ring can be surrounded by a retaining ring and arranged on a hollow cylindrical carrier element as applicable.

Abstract: A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure side by way of a bearing arrangement (56) and on the suction side by way of a bearing arrangement (30). The suction-side bearing arrangement (30) is disposed in a high-vacuum area (22) and includes an electromagnetic bearing. Preferably, a coil (32) of the electromagnetic bearing is disposed in a recess (38) of a housing element (40). The recess (38) is pressure-encapsulated, in particular by a tubular closure element (42).

Abstract: A multi-stage pump rotor (10) for a turbomolecular pump has at least two separate blade disk rings (17), each having a motor ring (12) and at least one blade disk (14). A cylindrical reinforcement pipe (18), which surrounds the rotor rings (12) of the blade disk rings (17) on the outside without clearance, is provided between the blade disks (14) of adjacent blade disk rings (17). The reinforcement pipe (18) absorbs a large part of the tangential forces occurring during operation such that the pump rotor (10) has improved stability at high rotor speeds.

Abstract: A vacuum pump, in particular a turbomolecular pump or a multi-inlet pump, includes a rotor shaft (12) that supports at least one rotor device (14). The rotor shaft (12) is mounted on the pressure side by way of a bearing arrangement (56) and on the suction side by way of a bearing arrangement (30). The suction-side bearing arrangement (30) is disposed in a high-vacuum area (22) and includes an electromagnetic bearing. Preferably, a coil (32) of the electromagnetic bearing is disposed in a recess (38) of a housing element (40). The recess (38) is pressure-encapsulated, in particular by a tubular closure element (42).

Abstract: A rapidly rotating vacuum pump includes: a magnet-mounted rotor driven by an electric drive motor with a predetermined constant nominal rotational frequency (fnom). The rotor and a rotor bearing are embodied in such a way that the bending-critical counter-rotational resonance frequency (fcrit) is between 3% and a maximum of 30% above the nominal rotational frequency (fnom), thereby preventing an overspeed.

Abstract: A turbomolecular pump (10) includes a rotor (12) connected to a drive shaft (10). The rotor (12) has multiple rotor vanes (16). The rotor (12) is surrounded by stator rings (26) with one stator ring (26) is provided for each rotor vane (16). In order to enable radial expansion of the rotor vanes during operation, the stator rings (26) have annular grooves (32).

Abstract: The vacuum pump comprises a casing (10) closed by a vacuum cover (20). Between an end wall (14) of the casing (10) and the vacuum cover (20), a circuit board (16) is arranged for current feedthrough. The circuit board (16) is sealed by two sealing elements (15, 21) of different diameters so that an annular partial region (22) is on its outer side subjected to the atmospheric pressure and is on its inner side subjected to the vacuum. It is avoided that the circuit board (16) laterally projects beyond the contour of the casing (10).

Abstract: A multi-stage pump rotor (10) for a turbomolecular pump has at least two separate blade disk rings (17), each having a motor ring (12) and at least one blade disk (14). A cylindrical reinforcement pipe (18), which surrounds the rotor rings (12) of the blade disk rings (17) on the outside without clearance, is provided between the blade disks (14) of adjacent blade disk rings (17). The reinforcement pipe (18) absorbs a large part of the tangential forces occurring during operation such that the pump rotor (10) has improved stability at high rotor speeds.

Abstract: A vacuum line (10) includes two line parts (12, 13) connected by a vibration damper (14). The vibration damper (14) is formed by a vertical outer pipe (18) and a vertical inner pipe (20) spaced from the outer pipe (18). A flexible tension sleeve (30) is fastened between opening edges (19, 42) of the outer pipe (18) and the inner pipe (20). The tension sleeve establishes a vacuum-tight connection of opening edges (19, 42) of the outer pipe (18) and the inner pipe (20).

Abstract: A vacuum pump (10) has a vacuum-tight housing (12) and having a gas-tight electrical leadthrough assembly (20) for producing an electrical connection between an electrical component (14,16,18) within the housing (12) and the exterior of the housing. The leadthrough assembly (20) is formed by a housing opening (22), by a sealing compound body (24) seated on the opening, by an electric line in the sealing compound body (24), by a sealing ring (26) between the opening edge of the housing opening (22) and the sealing compound body (24), and by a fixing means (32) for fastening the sealing compound body (24) to the housing (12).

Abstract: A multi-stage vacuum pump includes at least one turbo-compressor stage (11) and is equipped with a circular compressor stage (33) on the pressure side of the turbo-compressor stage. The pump has small axial dimensions, enabling the compression to be increased without significantly increasing the space requirement.

Abstract: A mechanical vacuum pump includes a rotor made of a light metal alloy by powder metallurgy. The powder metallurgy increases the resistance of the rotor to heat and creep.

Abstract: A side channel pump, preferably a vacuum pump, includes a driven rotor (16) and a fixed stator (14). The rotor (16) and the stator (14) define a pump channel circulating in a peripheral direction. Blades are fixed onto the rotor, protruding into the cross-section of the pump channel. The pump channel also includes a blade-free side channel (44). The pump channel (22) containing the side channel (44) extends in a helical manner around the rotor (16). The pump channel is advantageously not limited to the length of a winding but can have the length of substantially any number of uninterrupted windings. As a result, a high suction performance and a high compression ratio in the pump can be obtained.

Abstract: A friction vacuum pump (1) comprises a fixed element (7) bearing rows of stator blades (3) and a rotating element (6) bearing rows of rotor blades (2). The rows of stator blades and rotor blades are arranged concentrically with respect to an axis of rotation (4) of the rotating element (6) and mesh with each other. In order to create in the axial direct a short friction pump, the elements (6, 7) bearing the rows of rotor blades and stator blades extend in a substantially radial manner and the longitudinal axes of the blades (2, 3) extend in a substantially axial manner.

Abstract: The invention relates to a magnetic bearing having a fixed first bearing portion and a movable second bearing portion which is contactlessly supported on the first bearing portion. The first bearing portion (12) comprises a magnetic coil (42) generating a magnetic field and having a yoke (44). The second bearing portion (18) comprising a permanent magnet (50) which is magnetized in alignment with the yoke (44). The permanent magnet of the second bearing portion has an attracting effect upon the yoke of the first bearing portion. To avoid this, the first bearing portion is provided with a permanently magnetized compensation magnet (54) which is located opposite the permanent magnet (50) of the second bearing portion (18) and is magnetized oppositely to the permanent magnet (50).