Abstract: An apparatus for capturing superimposed distance and intensity images includes a distance image measuring arrangement provided with a distance radiation source, an intensity radiation source, a distance detection unit and an intensity detection unit. Distance measurement radiation from the distance radiation source and intensity measurement radiation from the intensity radiation source are incident on an area of a surface of a test object via a jointly used radiation deflection unit. The optical components of the distance image measuring arrangement and the intensity image measuring arrangement are mounted on a support structure in a fixed spatial relationship with respect to each other. Distance and intensity images are thus superimposed in an optically positionally accurate manner to produce high-quality real-time images.

Abstract: An apparatus for capturing superimposed distance and intensity images includes a distance image measuring arrangement provided with a distance radiation source, an intensity radiation source, a distance detection unit and an intensity detection unit. Distance measurement radiation from the distance radiation source and intensity measurement radiation from the intensity radiation source are incident on an area of a surface of a test object via a jointly used radiation deflection unit. The optical components of the distance image measuring arrangement and the intensity image measuring arrangement are mounted on a support structure in a fixed spatial relationship with respect to each other. Distance and intensity images are thus superimposed in an optically positionally accurate manner to produce high-quality real-time images.

Abstract: In a laser interferometer for interferometric linear measurement, a semiconductor laser (1) energizes a measuring interferometer (7) with which there is coordinated a spatially directly adjacent reference interferometer (9). The output signal of the reference signal detector (22) of the reference interferometer (9) is used to effet in the event of changes in the refraction index of the medium occupying the reference section and the measuring section a frequency tuning of the semiconductor laser (1) in such a way that the wavelength acting as a length normal will be kept constant in the reference interferometer (9) and the measuring interferometer (7).

Abstract: A camera for recording the topography of a specimen surface by generation of a Moire image with the aid of an object grid applied on the object, and which includes a CCD sensor with a reference grid (8) which is applied as a physical grid structure directly on the light incidence surface (4) of the CCD sensor.