Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).

Abstract: A multi-inlet vacuum pump has a first pump device (10) and a second pump device (12). The first pump device (10) includes a first rotor element (18) having a plurality of first rotor discs (20, 21) arranged consecutively in the delivery direction (36). The second rotor disc includes a second rotor element (26) having a plurality of second rotor discs (28) arranged consecutively in the delivery direction (36). A first fluid flow (34) is suctioned through a main inlet (32) by the first pump device (10) and delivered in the direction of the second pump device (12). A second fluid flow (40) is suctioned through an intermediate inlet (38) by the second pump device and delivered in the direction of a pump outlet. The diameter of the last rotor disc (21) of the first pump (10) substantially corresponds to the diameter of the first rotor (28) of the second pump device (12).

Abstract: A multi-inlet vacuum pump includes a first pump device (10) including a first rotor element (18) with a plurality of first rotor disks (20) serially arranged in the conveying direction (36), and a second pump device (12) including a further rotor element (26) with a plurality of second rotor disks (28) serially arranged in the conveying direction (36). A diameter of the second rotor disks (28) is at least partially larger than a diameter of the first rotor disks (20). A main inlet (32) sucks in a first fluid stream (34) with the first pump device (10). The first fluid stream (34) is conveyed in the direction of the further pump device (12). An intermediate inlet (38) sucks in a second fluid stream (40) with the second pump device (12). The second fluid stream (40) is conveyed in the direction of a pump outlet. A process of merging the two fluid streams (34,40) will occur within the second pump device (12), preferably between two adjacent second rotor disks (28) of the second pump device (12).

Abstract: A vacuum pump, particularly a turbomolecular pump or multi-inlet pump, comprises a rotor shaft (12) carrying at least one rotor means (14). The rotor shaft (12) is supported on the pressure side by a bearing assembly (56) and on the suction-side by a further bearing assembly (30). According to the invention, the suction-side bearing assembly (30) comprises an electromagnetic bearing (32,34). Further according to the invention, the pressure-side bearing assembly (56) comprises a ball bearing (58) so that the rotor shaft (12) can be given the largest possible length. The rolling bearing (58) is preferably biased by the electromagnetic bearing (32,34).

Abstract: A turbomolecular vacuum pump (1) has an inlet (3) and an outlet (4) and rotor and stator vanes (5 and 6), situated between the inlet and outlet. The rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation. At least a part of the rotor vanes (6) have a rear side (12) which is convex on the suction-side and concave on the delivery side. Alternately, at least part of the rotor vanes (6) have a front side (11), which is concave on the suction side and convex on the delivery side.